发明授权
- 专利标题: Coating method
- 专利标题(中): 涂布方法
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申请号: US12703236申请日: 2010-02-10
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公开(公告)号: US08304018B2公开(公告)日: 2012-11-06
- 发明人: Koji Takayanagi , Tomohiro Iseki , Katsunori Ichino , Kousuke Yoshihara
- 申请人: Koji Takayanagi , Tomohiro Iseki , Katsunori Ichino , Kousuke Yoshihara
- 申请人地址: JP Minato-Ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-Ku
- 代理机构: Burr & Brown
- 优先权: JP2009-031365 20090213; JP2009-263158 20091118
- 主分类号: B05D3/12
- IPC分类号: B05D3/12
摘要:
There is provided a coating method which can efficiently apply a coating liquid, such as a liquid resist, to the entire surface of a wafer even when the coating liquid is supplied in a smaller amount than a conventional one, and can therefore reduce the consumption of the coating liquid. The coating method includes: a first step of rotating the substrate at a first rotating speed while supplying the coating liquid onto approximately the center of the rotating substrate; a second step of rotating the substrate at a second rotating speed which is lower than the first rotating speed; a third step of rotating the substrate at a third rotating speed which is higher than the second rotating speed; and a fourth step of rotating the substrate at a fourth rotating speed which is higher than the second rotating speed and lower than the third rotating speed.
公开/授权文献
- US20100209607A1 COATING METHOD 公开/授权日:2010-08-19
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