发明授权
US08304567B2 Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex 有权
有机钌络合物,以及使用钌络合物制造钌薄膜的方法

  • 专利标题: Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex
  • 专利标题(中): 有机钌络合物,以及使用钌络合物制造钌薄膜的方法
  • 申请号: US12375278
    申请日: 2007-07-26
  • 公开(公告)号: US08304567B2
    公开(公告)日: 2012-11-06
  • 发明人: Takumi KadotaChihiro HasegawaHiroki KanatoHiroshi Nihei
  • 申请人: Takumi KadotaChihiro HasegawaHiroki KanatoHiroshi Nihei
  • 申请人地址: JP Ube-shi, Yamaguchi
  • 专利权人: Ube Industries, Ltd
  • 当前专利权人: Ube Industries, Ltd
  • 当前专利权人地址: JP Ube-shi, Yamaguchi
  • 代理机构: Nixon Peabody LLP
  • 代理商 Jeffrey L. Costellia
  • 优先权: JP2006-205402 20060727; JP2006-233225 20060830; JP2006-233226 20060830; JP2006-308812 20061115; JP2006-338003 20061215; JP2007-008680 20070118
  • 国际申请: PCT/JP2007/064713 WO 20070726
  • 国际公布: WO2008/013244 WO 20080131
  • 主分类号: C07F15/00
  • IPC分类号: C07F15/00 C23C16/00
Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex
摘要:
An organoruthenium complex represented by the general formula (1-1), bis(acetylacetonato)(1,5-hexadiene)ruthenium and bis(acetylacetonato)(1,3-pentadiene)ruthenium have low melting points, show excellent stability against moisture, air and heat, and are suitable for the film formation by a CVD method. (1-1) wherein X represents a group represented by the general formula (1-2); Y represent a group represented by the general formula (1-2) or a linear or branched alkyl group having 1 to 8 carbon atoms; Z represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; and L represents an unsaturated hydrocarbon compound having at least two double bonds: (1-2) wherein Ra and Rb independently represent a linear or branched alkyl group having 1 to 5 carbon atoms.
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