发明授权
- 专利标题: Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex
- 专利标题(中): 有机钌络合物,以及使用钌络合物制造钌薄膜的方法
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申请号: US12375278申请日: 2007-07-26
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公开(公告)号: US08304567B2公开(公告)日: 2012-11-06
- 发明人: Takumi Kadota , Chihiro Hasegawa , Hiroki Kanato , Hiroshi Nihei
- 申请人: Takumi Kadota , Chihiro Hasegawa , Hiroki Kanato , Hiroshi Nihei
- 申请人地址: JP Ube-shi, Yamaguchi
- 专利权人: Ube Industries, Ltd
- 当前专利权人: Ube Industries, Ltd
- 当前专利权人地址: JP Ube-shi, Yamaguchi
- 代理机构: Nixon Peabody LLP
- 代理商 Jeffrey L. Costellia
- 优先权: JP2006-205402 20060727; JP2006-233225 20060830; JP2006-233226 20060830; JP2006-308812 20061115; JP2006-338003 20061215; JP2007-008680 20070118
- 国际申请: PCT/JP2007/064713 WO 20070726
- 国际公布: WO2008/013244 WO 20080131
- 主分类号: C07F15/00
- IPC分类号: C07F15/00 ; C23C16/00
摘要:
An organoruthenium complex represented by the general formula (1-1), bis(acetylacetonato)(1,5-hexadiene)ruthenium and bis(acetylacetonato)(1,3-pentadiene)ruthenium have low melting points, show excellent stability against moisture, air and heat, and are suitable for the film formation by a CVD method. (1-1) wherein X represents a group represented by the general formula (1-2); Y represent a group represented by the general formula (1-2) or a linear or branched alkyl group having 1 to 8 carbon atoms; Z represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; and L represents an unsaturated hydrocarbon compound having at least two double bonds: (1-2) wherein Ra and Rb independently represent a linear or branched alkyl group having 1 to 5 carbon atoms.
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