发明授权
US08308052B2 Thermal gradient reflow for forming columnar grain structures for solder bumps
有权
用于形成用于焊料凸块的柱状晶粒结构的热梯度回流
- 专利标题: Thermal gradient reflow for forming columnar grain structures for solder bumps
- 专利标题(中): 用于形成用于焊料凸块的柱状晶粒结构的热梯度回流
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申请号: US12954121申请日: 2010-11-24
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公开(公告)号: US08308052B2公开(公告)日: 2012-11-13
- 发明人: Chih-Horng Chang , Yian-Liang Kuo , Chih-Hang Tung , Tsung-Fu Tsai
- 申请人: Chih-Horng Chang , Yian-Liang Kuo , Chih-Hang Tung , Tsung-Fu Tsai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: B23K31/02
- IPC分类号: B23K31/02 ; H01L21/44
摘要:
A method includes heating a package structure including a first work piece and a second work piece to melt a plurality of solder bumps between the first and the second work pieces; and after the step of heating, allowing the plurality of solder bumps to solidify. During the step of solidifying, a first side of the package structure is maintained at a first temperature higher than a melting temperature of the plurality of solder bumps by using a heating source. During the step of solidifying, a second side of the package structure is maintained at a second temperature lower than the melting temperature by using a cooling source, wherein the second side is opposite the first side.
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