发明授权
- 专利标题： Planar coil and method of making the same
- 专利标题（中）： 平面线圈及其制作方法
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申请号： US12899836申请日： 2010-10-07
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公开(公告)号： US08310328B2公开(公告)日： 2012-11-13
- 发明人: Hung Yi Lin , Ming Fa Chen
- 申请人： Hung Yi Lin , Ming Fa Chen
- 申请人地址： TW Taoyuan County
- 专利权人： Touch Micro-System Technology Corp.
- 当前专利权人： Touch Micro-System Technology Corp.
- 当前专利权人地址： TW Taoyuan County
- 代理机构： Bacon & Thomas, PLLC
- 主分类号： H01F5/00
- IPC分类号： H01F5/00 ; H01F27/28 ; H01L27/08
摘要：
A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.
公开/授权文献
- US20120086537A1 PLANAR COIL AND METHOD OF MAKING THE SAME 公开/授权日：2012-04-12