PACKAGE STRUCTURE AND PACKAGING METHOD
    1.
    发明申请
    PACKAGE STRUCTURE AND PACKAGING METHOD 审中-公开
    包装结构和包装方法

    公开(公告)号:US20130266774A1

    公开(公告)日:2013-10-10

    申请号:US13491024

    申请日:2012-06-07

    申请人: Pinyen Lin Yu-Fu Kang

    发明人: Pinyen Lin Yu-Fu Kang

    IPC分类号: B32B3/08 C09J5/02

    摘要: A package structure and a packaging method for manufacturing the package structure are provided. The package structure comprises a cover wafer, a device wafer and a bonding material. The cover wafer has an optical element, and a surface of the cover wafer is defined with a height difference that is greater than 20 micrometers. The bonding material has a width and continuously surrounds the optical device, and is disposed between the cover wafer and the device wafer, in which the width is between 10 micrometers and 150 micrometers. The bonding material hermetically bonds the cover wafer and the device wafer to make a leakage rate of the package structure less than 5e−8 atm-cc/sec.

    摘要翻译: 提供了用于制造封装结构的封装结构和封装方法。 封装结构包括盖晶片,器件晶片和接合材料。 覆盖晶片具有光学元件,并且盖晶片的表面被限定为具有大于20微米的高度差。 接合材料具有宽度并且连续地围绕光学器件,并且设置在覆盖晶片和器件晶片之间,其中宽度在10微米到150微米之间。 接合材料密封盖玻片和器件晶片,以使封装结构的泄漏率小于5e-8atm-cc / sec。

    Method of modulating resonant frequency of torsional MEMS device
    2.
    发明授权
    Method of modulating resonant frequency of torsional MEMS device 失效
    调制扭转MEMS器件谐振频率的方法

    公开(公告)号:US07938977B2

    公开(公告)日:2011-05-10

    申请号:US12703747

    申请日:2010-02-10

    IPC分类号: C23F1/00 H02K7/00 H02N1/00

    CPC分类号: G02B26/0833

    摘要: A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.

    摘要翻译: 公开了一种扭转MEMS装置。 扭转MEMS装置包括支撑结构,平台和至少两个铰链,其将平台连接到支撑结构。 该平台具有活动区域和非活动区域。 多个牺牲元件设置在非有效区域中。 如果扭转MEMS器件的谐振频率小于扭转MEMS器件的预定标准谐振频率,则去除至少一个牺牲元件以减小扭转MEMS器件的总质量,并且为了增加谐振频率 扭转MEMS器件。

    Method for making a planar coil
    3.
    发明授权
    Method for making a planar coil 失效
    制造平面线圈的方法

    公开(公告)号:US08453318B2

    公开(公告)日:2013-06-04

    申请号:US13651771

    申请日:2012-10-15

    IPC分类号: H01F7/06

    摘要: A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.

    摘要翻译: 在本发明中公开了制造平面线圈的方法。 首先,提供具有沟槽的衬底。 然后,依次在基板上形成阻挡层和种子层。 隔离层用于引导导电材料流入沟槽的下部,使得沟槽开口处的导电材料的积聚在沟槽的下部被完全填充之前被阻止,从而避免了在沟槽中的间隙形成 沟渠。

    Biaxial scanning mirror for image forming apparatus and method for operating the same
    4.
    发明授权
    Biaxial scanning mirror for image forming apparatus and method for operating the same 失效
    用于图像形成装置的双轴扫描镜及其操作方法

    公开(公告)号:US08305671B2

    公开(公告)日:2012-11-06

    申请号:US12819264

    申请日:2010-06-21

    申请人: Hung-Yi Lin

    发明人: Hung-Yi Lin

    IPC分类号: G02B26/08

    CPC分类号: G02B26/101

    摘要: A biaxial scanning mirror is disclosed in the present invention. The mirror includes: a first wafer having several cavities forming a first row and a second row, several permanent magnets each installed in one of the cavities, a spacer and a second wafer. The second wafer includes: a mirror unit, rotating around a first axis, for reflecting light beams; and a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis. At least one coil substrate having a planar coil is assembled in the rotating unit.

    摘要翻译: 本发明公开了一种双轴扫描镜。 反射镜包括:具有形成第一排和第二排的多个空腔的第一晶片,各自安装在一个空腔中的几个永磁体,间隔件和第二晶片。 第二晶片包括:反射镜单元,围绕第一轴旋转,用于反射光束; 以及围绕所述镜单元形成的旋转单元,用于围绕垂直于所述第一轴线的第二轴线旋转所述镜子单元。 具有平面线圈的至少一个线圈基板组装在旋转单元中。

    ANNULAR STRUCTURE AND MICRO SCANNING MIRROR
    6.
    发明申请
    ANNULAR STRUCTURE AND MICRO SCANNING MIRROR 审中-公开
    环形结构和微扫描镜

    公开(公告)号:US20130278986A1

    公开(公告)日:2013-10-24

    申请号:US13542967

    申请日:2012-07-06

    IPC分类号: G02B26/10 G02B26/08

    CPC分类号: G02B26/105 G02B26/0841

    摘要: A micro scanning mirror is disclosed in the present invention. The micro scanning mirror includes a substrate, an annular structure and a mirror structure. The substrate includes a hollow area and a first shaft. The annular structure is disposed inside the hollow area on the substrate and encircles the mirror structure. The mirror structure includes a second shaft connected to the annular structure. The annular structure includes at least one first edge, at least one second edge and a first comb electrode. The first edge is connected to the first shaft, and an end of the second edge is connected to the first edge. The second edge includes a first side adjacent to the mirror structure, and a second side adjacent to the substrate. The first comb electrode is disposed on the second edge.

    摘要翻译: 在本发明中公开了一种微扫描镜。 微扫描镜包括基板,环形结构和反射镜结构。 基板包括中空区域和第一轴。 环形结构设置在基板上的中空区域的内部并且包围反射镜结构。 镜结构包括连接到环形结构的第二轴。 环形结构包括至少一个第一边缘,至少一个第二边缘和第一梳状电极。 第一边缘连接到第一轴,并且第二边缘的端部连接到第一边缘。 第二边缘包括邻近反射镜结构的第一侧和与基底相邻的第二侧。 第一梳状电极设置在第二边缘上。

    Phase Modulation Module and Projector Comprising the Same
    7.
    发明申请
    Phase Modulation Module and Projector Comprising the Same 审中-公开
    相位调制模块和投影机组成

    公开(公告)号:US20130258293A1

    公开(公告)日:2013-10-03

    申请号:US13799206

    申请日:2013-03-13

    IPC分类号: G02F1/01

    摘要: An optical phase modulation module and a projector comprising the same are provided. The optical phase modulation module comprises a transparent thin film with an electro-optic effect, a plurality of first upper electrodes, a plurality of second upper electrodes and a plurality of lower electrodes. The transparent thin film with the electro-optic effect has a top surface and a bottom surface. The first upper electrodes are formed on the top surface. The second upper electrodes are formed on the top surface and arranged alternately with the first upper electrodes. The lower electrodes are formed on the bottom surface. A first voltage difference exists between the first upper electrodes and the bottom electrodes, while a second voltage difference exists between the second upper electrodes and the bottom electrodes. Two different electric fields are produced within the transparent thin film with the electro-optic effect by the first voltage difference and the second voltage difference respectively.

    摘要翻译: 提供了一种光学相位调制模块和包括该光学相位调制模块的投影仪。 光学相位调制模块包括具有电光效应的透明薄膜,多个第一上电极,多个第二上电极和多个下电极。 具有电光效应的透明薄膜具有顶表面和底表面。 第一上电极形成在顶表面上。 第二上电极形成在顶表面上并与第一上电极交替布置。 下电极形成在底面上。 在第一上电极和底电极之间存在第一电压差,而在第二上电极和底电极之间存在第二电压差。 在透明薄膜内产生两电场效应,分别具有第一电压差和第二电压差的电光效应。

    Planar coil and method of making the same
    8.
    发明授权
    Planar coil and method of making the same 失效
    平面线圈及其制作方法

    公开(公告)号:US08310328B2

    公开(公告)日:2012-11-13

    申请号:US12899836

    申请日:2010-10-07

    IPC分类号: H01F5/00 H01F27/28 H01L27/08

    摘要: A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.

    摘要翻译: 在本发明中公开了制造平面线圈的方法。 首先,提供具有沟槽的衬底。 然后,依次在基板上形成阻挡层和种子层。 隔离层用于引导导电材料流入沟槽的下部,使得沟槽开口处的导电材料的积聚在沟槽的下部被完全填充之前被阻止,从而避免了在沟槽中的间隙形成 沟渠。

    Method of making white LED package structure having a silicon substrate
    9.
    发明授权
    Method of making white LED package structure having a silicon substrate 失效
    制造具有硅衬底的白色LED封装结构的方法

    公开(公告)号:US08172632B2

    公开(公告)日:2012-05-08

    申请号:US12613508

    申请日:2009-11-05

    IPC分类号: H01J9/26

    摘要: A method of making a white LED package structure having a silicon substrate comprises providing a silicon substrate and performing an etching process to form a plurality of cup-structures on a top surface of the silicon substrate. Next, a reflective layer on the top surface of the silicon substrate is formed, and a transparent insulating layer on the reflective layer is formed. Subsequently, a plurality of blue LEDs are respectively bonded in each cup-structure, wherein the blue LEDs have various wavelengths. Last, a plurality of kinds of phosphor powders corresponding to the wavelengths of the blue LEDs are mixed with each other and added to a sealing material, and a sealing process is performed to form a phosphor structure on the cup-structures.

    摘要翻译: 制造具有硅衬底的白色LED封装结构的方法包括提供硅衬底并执行蚀刻工艺以在硅衬底的顶表面上形成多个杯结构。 接下来,形成硅衬底的顶表面上的反射层,并且形成反射层上的透明绝缘层。 随后,在每个杯结构中分别结合多个蓝色LED,其中蓝色LED具有各种波长。 最后,将与蓝色LED的波长相对应的多种荧光体粉末彼此混合并添加到密封材料中,并且进行密封处理以在杯结构上形成荧光体结构。

    Biaxial scanning mirror for image forming apparatus
    10.
    发明授权
    Biaxial scanning mirror for image forming apparatus 失效
    用于图像形成装置的双轴扫描镜

    公开(公告)号:US08456724B2

    公开(公告)日:2013-06-04

    申请号:US12817338

    申请日:2010-06-17

    申请人: Hung-Yi Lin

    发明人: Hung-Yi Lin

    IPC分类号: G02B26/12

    CPC分类号: G02B26/101 G02B26/085

    摘要: A biaxial scanning mirror for an image forming apparatus includes a first wafer, a second wafer, and a spacer. The first wafer includes a mirror unit, a rectangular rotating unit, a permanent magnet, and a magnetically permeable layer. The second wafer has at least two cores each surrounded by a planar coil applied with an AC current for switching magnetic polarization of the cores such that the cores are attracted to or repelled from the rotating unit alternatively, thereby driving the rotating unit to rotate.

    摘要翻译: 用于图像形成装置的双轴扫描镜包括第一晶片,第二晶片和间隔物。 第一晶片包括镜单元,矩形旋转单元,永磁体和导磁层。 第二晶片具有至少两个磁芯,每个磁芯都被施加有交流电流的平面线圈围绕,用于切换磁芯的磁极化,使得磁芯交替地被吸引或从旋转单元排斥,从而驱动旋转单元旋转。