发明授权
- 专利标题: Semiconductor device and method for fabricating the same
- 专利标题(中): 半导体装置及其制造方法
-
申请号: US12358188申请日: 2009-01-22
-
公开(公告)号: US08313993B2公开(公告)日: 2012-11-20
- 发明人: Hag-Ju Cho , Anabela Veloso , HongYu Yu , Stefan Kubicek , Shou-Zen Chang
- 申请人: Hag-Ju Cho , Anabela Veloso , HongYu Yu , Stefan Kubicek , Shou-Zen Chang
- 申请人地址: BE Leuven KR Suwon-si, Gyeonggi-do TW Hsinchu
- 专利权人: IMEC,Samsung Electronics Co., Ltd.,Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: IMEC,Samsung Electronics Co., Ltd.,Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: BE Leuven KR Suwon-si, Gyeonggi-do TW Hsinchu
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: EP08157791 20080606
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
A dual work function semiconductor device and method for fabricating the same are disclosed. In one aspect, a device includes a first and second transistor on a first and second substrate region. The first and second transistors include a first gate stack having a first work function and a second gate stack having a second work function respectively. The first and second gate stack each include a host dielectric, a gate electrode comprising a metal layer, and a second dielectric capping layer therebetween. The second gate stack further has a first dielectric capping layer between the host dielectric and metal layer. The metal layer is selected to determine the first work function. The first dielectric capping layer is selected to determine the second work function.
公开/授权文献
- US20090184376A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2009-07-23
信息查询
IPC分类: