发明授权
- 专利标题： Piezoelectric actuators
- 专利标题（中）： 压电执行器
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申请号： US12615826申请日： 2009-11-10
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公开(公告)号： US08324785B2公开(公告)日： 2012-12-04
- 发明人: Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
- 申请人： Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
- 申请人地址： US CA Oakland
- 专利权人： The Regents of the University of California
- 当前专利权人： The Regents of the University of California
- 当前专利权人地址： US CA Oakland
- 代理机构： Bozicevic Field & Francis LLP
- 代理商 Bret E. Field; Rudy J. Ng
- 主分类号： H01L41/09
- IPC分类号： H01L41/09
摘要：
Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.
公开/授权文献
- US20110107962A1 PIEZOELECTRIC ACTUATORS 公开/授权日：2011-05-12
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