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公开(公告)号:US08324785B2
公开(公告)日:2012-12-04
申请号:US12615826
申请日:2009-11-10
申请人: Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
发明人: Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
IPC分类号: H01L41/09
CPC分类号: H02N2/043 , B33Y40/00 , F16K31/005 , H01L41/314 , H01L41/332 , Y10T29/42 , Y10T137/0318
摘要: Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.
摘要翻译: 提供压电致动器。 在一些情况下,压电致动器是高精度压电致动器。 压电梁可以具有双人字形配置。 还提供了制造压电致动器的方法,例如使用微机电系统(MEMS)制造技术,以及使用压电致动器的方法,例如作为流体分配系统中的阀。
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公开(公告)号:US20110107962A1
公开(公告)日:2011-05-12
申请号:US12615826
申请日:2009-11-10
申请人: Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
发明人: Ya-Mei Chen , Michael Stephen Sheppy , Matthew A. Hopcroft , Albert P. Pisano , Rajesh Vinodrai Mehta , Michael Alan Marcus , Gilbert Allan Hawkins
IPC分类号: B05C19/04 , H01L41/053 , F16K31/02 , F15D1/00 , H01L41/22
CPC分类号: H02N2/043 , B33Y40/00 , F16K31/005 , H01L41/314 , H01L41/332 , Y10T29/42 , Y10T137/0318
摘要: Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.
摘要翻译: 提供压电致动器。 在一些情况下,压电致动器是高精度压电致动器。 压电梁可以具有双人字形配置。 还提供了制造压电致动器的方法,例如使用微机电系统(MEMS)制造技术,以及使用压电致动器的方法,例如作为流体分配系统中的阀。
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公开(公告)号:US06621387B1
公开(公告)日:2003-09-16
申请号:US10084561
申请日:2002-02-25
申请人: Matthew A. Hopcroft
发明人: Matthew A. Hopcroft
IPC分类号: H01P110
CPC分类号: H01P1/127 , H01G5/16 , H01H59/0009
摘要: A micro-electro-mechanical switch includes a transmission line having a gap disposed along it. The switch also includes at least one ground plane located proximal to the transmission line. A first bridge is configured to close the gap along the transmission line, and a second bridge is configured to connect the transmission line to the ground plane. A method of manufacturing a micro-electro-mechanical switch includes forming, on a first substrate, a transmission line and at least one ground plane, wherein the transmission line includes a gap along it. The method also includes forming, on a second substrate, a first bridge configured to close the gap disposed along the transmission line, and a second bridge configured to connect the transmission line to the ground plane. Then transferring the first and second bridges to the first substrate.
摘要翻译: 微机电开关包括沿其布置的间隙的传输线。 开关还包括位于传输线附近的至少一个接地平面。 第一桥被配置为沿着传输线关闭间隙,并且第二桥被配置为将传输线连接到接地平面。 一种制造微机电开关的方法包括在第一基板上形成传输线和至少一个接地平面,其中传输线包括沿其间的间隙。 所述方法还包括在第二基板上形成第一桥,所述第一桥被配置为闭合沿着所述传输线设置的间隙,以及第二桥,被配置为将所述传输线连接到所述接地平面。 然后将第一和第二桥梁转移到第一基板。
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