发明授权
- 专利标题: Electrical contacts for use with vacuum deposition sources
- 专利标题(中): 与真空沉积源一起使用的电触点
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申请号: US12539458申请日: 2009-08-11
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公开(公告)号: US08328561B2公开(公告)日: 2012-12-11
- 发明人: Scott Wayne Priddy
- 申请人: Scott Wayne Priddy
- 申请人地址: US MN Plainview
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: US MN Plainview
- 代理机构: Kagan Binder, PLLC
- 主分类号: H01R41/00
- IPC分类号: H01R41/00
摘要:
The present invention provides electrical contact assemblies can be used with vacuum deposition sources. In one exemplary application, the electrical contact assemblies of the present invention provide electrical contact to an arcuate or otherwise curved surface of a heating device used with a vacuum deposition source. In one embodiment, a set of power straps are each connected at one end to a power source feed-through wire and at the other end are urged by a pressure pin and a flat spring into electrical communication with one of the electrical contacts on the heating device.
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