发明授权
- 专利标题： Implant mask with moveable hinged mask segments
- 专利标题（中）： 植入式面膜与可移动铰链的面膜段
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申请号： US12757616申请日： 2010-04-09
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公开(公告)号： US08330128B2公开(公告)日： 2012-12-11
- 发明人: Robert B. Vopat , William T. Weaver , Charles T. Carlson
- 申请人： Robert B. Vopat , William T. Weaver , Charles T. Carlson
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： G21K5/10
- IPC分类号： G21K5/10 ; H01J37/08 ; H01L21/425
摘要：
This apparatus has two mask segments. Each mask segment has apertures that an ion beam may pass through. These mask segments can move between a first and second position using hinges. One or more workpieces are disposed behind the mask segments when these mask segments are in a second position. The two mask segments are configured to cover the one or more workpieces in one instance. Ions are implanted into the one or more workpieces through the apertures in the mask segments.
公开/授权文献
- US20100314559A1 IMPLANT MASK WITH MOVEABLE MASK SEGMENTS 公开/授权日：2010-12-16
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