发明授权
- 专利标题: Mounting table structure, and processing apparatus
- 专利标题(中): 安装台结构和加工设备
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申请号: US12505282申请日: 2009-07-17
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公开(公告)号: US08334481B2公开(公告)日: 2012-12-18
- 发明人: Tomohito Komatsu , Hirohiko Yamamoto , Daisuke Toriya
- 申请人: Tomohito Komatsu , Hirohiko Yamamoto , Daisuke Toriya
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-008105 20070117; JP2007-250195 20070926
- 主分类号: F27B5/14
- IPC分类号: F27B5/14 ; F27D11/02 ; H05B3/03 ; H05B3/08
摘要:
A mounting table body made of ceramic includes power-receiving conductor portions and buried therein. A surface of mounting table body is formed with a recessed connection hole and a connection terminal electrically jointed to the power-receiving conductor portion and exposed into the connection hole, the connection terminal being made of a high-melting-point metal, an alloy thereof or a compound thereof. A power-feeding line member provided with a power-feeding connector portion is inserted at its leading end portion into the connection hole to feed electricity to the power-receiving conductor portion. A stress relaxing member is interposed between the connection terminal and the power-feeding connector portion. The stress relaxing member and the connection terminal are jointed together by a brazing material. The stress relaxing member is made of a metal free from cobalt and nickel or an alloy thereof.
公开/授权文献
- US20090277895A1 MOUNTING TABLE STRUCTURE, AND PROCESSING APPARATUS 公开/授权日:2009-11-12
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