发明授权
- 专利标题: Semiconductor device including coupling ball with layers of aluminum and copper alloys
- 专利标题(中): 半导体器件包括耦合球与铝和铜合金层
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申请号: US13064611申请日: 2011-04-04
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公开(公告)号: US08334596B2公开(公告)日: 2012-12-18
- 发明人: Takekazu Tanaka , Kouhei Takahashi , Seiji Okabe
- 申请人: Takekazu Tanaka , Kouhei Takahashi , Seiji Okabe
- 申请人地址: JP Kawasaki-Shi, Kanagawa
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kawasaki-Shi, Kanagawa
- 代理机构: McGinn IP Law Group, PLLC
- 优先权: JP2007-038912 20070220; JP2007-337436 20071227
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device includes an electrode pad provided on a semiconductor chip, in which the electrode pad includes aluminum (Al) as a major constituent and further including copper (Cu), a coupling ball primarily including Cu, the coupling ball is coupled to the electrode pad such that a plurality of layers of Cu and Al alloys are formed at a junction between the electrode pad and the coupling ball, and an encapsulating resin including a halogen of less than or equal to 1000 ppm, the encapsulating resin covering at least the electrode pad and the junction between the electrode pad and the coupling ball. A dimensional area of the plurality of layers of Cu and Al alloys is equal to or larger than 50% of a dimensional area of the junction between the electrode pad and the coupling ball. The plurality of layers of Cu and Al alloys includes a CuAl2 layer, a CuAl layer formed on the CuAl2 layer, and a layer including one of Cu9Al4 and Cu3Al2 formed on the CuAl layer.
公开/授权文献
- US20110241204A1 Semiconductor device 公开/授权日:2011-10-06
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