发明授权
- 专利标题: Embedded stressor for semiconductor structures
- 专利标题(中): 半导体结构的嵌入式应力器
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申请号: US12625827申请日: 2009-11-25
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公开(公告)号: US08338258B2公开(公告)日: 2012-12-25
- 发明人: Dechao Guo , Shu-Jen Han , Pranita Kulkarni , Philip J. Oldiges
- 申请人: Dechao Guo , Shu-Jen Han , Pranita Kulkarni , Philip J. Oldiges
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method of fabricating an embedded stressor within a semiconductor structure and a semiconductor structure including the embedded stressor includes forming forming a dummy gate stack over a substrate of stressor material, anistropically etching sidewall portions of the substrate subjacent to the dummy gate stack to form the embedded stressor having angled sidewall portions, forming conductive material onto the angled sidewall portions of the embedded stressor, removing the dummy gate stack, planarizing the conductive material, and forming a gate stack on the conductive material.
公开/授权文献
- US20110121370A1 EMBEDDED STRESSOR FOR SEMICONDUCTOR STRUCTURES 公开/授权日:2011-05-26
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