发明授权
- 专利标题: DRAM with schottky barrier FET and MIM trench capacitor
- 专利标题(中): 具有肖特基势垒FET和MIM沟槽电容器的DRAM
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申请号: US13073103申请日: 2011-03-28
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公开(公告)号: US08343864B2公开(公告)日: 2013-01-01
- 发明人: Puneet Goyal , Herbert Lei Ho , Pradeep Jana , Jin Liu
- 申请人: Puneet Goyal , Herbert Lei Ho , Pradeep Jana , Jin Liu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Joseph P. Abate; Howard M. Cohn
- 主分类号: H01L29/28
- IPC分类号: H01L29/28 ; H01L29/40 ; H01L29/47
摘要:
A semiconductor circuit and method of fabrication is disclosed. In one embodiment, the semiconductor circuit comprises a metal-insulator-metal trench capacitor in a silicon substrate. A field effect transistor is disposed on the silicon substrate adjacent to the metal-insulator-metal trench capacitor, and a silicide region is disposed between the field effect transistor and the metal-insulator-metal trench capacitor. Electrical connectivity between the transistor and capacitor is achieved without the need for a buried strap.
公开/授权文献
- US20120248522A1 DRAM WITH SCHOTTKY BARRIER FET AND MIM TRENCH CAPACITOR 公开/授权日:2012-10-04
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