Invention Grant
- Patent Title: DRAM with schottky barrier FET and MIM trench capacitor
- Patent Title (中): 具有肖特基势垒FET和MIM沟槽电容器的DRAM
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Application No.: US13073103Application Date: 2011-03-28
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Publication No.: US08343864B2Publication Date: 2013-01-01
- Inventor: Puneet Goyal , Herbert Lei Ho , Pradeep Jana , Jin Liu
- Applicant: Puneet Goyal , Herbert Lei Ho , Pradeep Jana , Jin Liu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joseph P. Abate; Howard M. Cohn
- Main IPC: H01L29/28
- IPC: H01L29/28 ; H01L29/40 ; H01L29/47

Abstract:
A semiconductor circuit and method of fabrication is disclosed. In one embodiment, the semiconductor circuit comprises a metal-insulator-metal trench capacitor in a silicon substrate. A field effect transistor is disposed on the silicon substrate adjacent to the metal-insulator-metal trench capacitor, and a silicide region is disposed between the field effect transistor and the metal-insulator-metal trench capacitor. Electrical connectivity between the transistor and capacitor is achieved without the need for a buried strap.
Public/Granted literature
- US20120248522A1 DRAM WITH SCHOTTKY BARRIER FET AND MIM TRENCH CAPACITOR Public/Granted day:2012-10-04
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