发明授权
- 专利标题: Processing system
- 专利标题(中): 处理系统
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申请号: US13336155申请日: 2011-12-23
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公开(公告)号: US08350227B2公开(公告)日: 2013-01-08
- 发明人: Holger Doemer , Stefan Martens , Walter Mack
- 申请人: Holger Doemer , Stefan Martens , Walter Mack
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102008045336 20080901
- 主分类号: G21K5/04
- IPC分类号: G21K5/04
摘要:
A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; and a protector including an actuator and a plate connected to the actuator. The actuator is configured to move the plate between a first position in which it protects a component of the particle beam column from particles released from the object by the laser beam and a second position in which the component of the particle beam column is not protected from particles released from the object by the laser beam.
公开/授权文献
- US20120091363A1 PROCESSING SYSTEM 公开/授权日:2012-04-19