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US08351048B2 Linear-carrier phase-mask interferometer 有权
线性载波相位掩模干涉仪

Linear-carrier phase-mask interferometer
Abstract:
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.
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