Invention Grant
US08354033B2 Method for producing porous microneedles and their use 失效
生产多孔微针的方法及其应用

Method for producing porous microneedles and their use
Abstract:
A method for producing porous microneedles (10) situated in an array on a silicon substrate includes: providing a silicon substrate, applying a first etching mask, patterning microneedles using a DRIE process (“deep reactive ion etching”), removing the first etching mask, at least partially porosifying the Si substrate, the porosification beginning on the front side of the Si substrate and a porous reservoir being formed.
Public/Granted literature
Information query
Patent Agency Ranking
0/0