发明授权
- 专利标题: Mass flow meter and mass flow controller
- 专利标题(中): 质量流量计和质量流量控制器
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申请号: US12625366申请日: 2009-11-24
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公开(公告)号: US08356623B2公开(公告)日: 2013-01-22
- 发明人: Yasuhiro Isobe , Osamu Horinouchi , Yuki Tanaka , Masao Yamaguchi , Yukimasa Furukawa
- 申请人: Yasuhiro Isobe , Osamu Horinouchi , Yuki Tanaka , Masao Yamaguchi , Yukimasa Furukawa
- 申请人地址: JP Kyoto-shi
- 专利权人: Horiba STEC, Co., Ltd.
- 当前专利权人: Horiba STEC, Co., Ltd.
- 当前专利权人地址: JP Kyoto-shi
- 代理机构: Alleman Hall McCoy Russell & Tuttle LLP
- 优先权: JP2008-331541 20081225; JP2009-264271 20091119
- 主分类号: F16K31/00
- IPC分类号: F16K31/00
摘要:
In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.
公开/授权文献
- US20100163119A1 MASS FLOW METER AND MASS FLOW CONTROLLER 公开/授权日:2010-07-01
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