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公开(公告)号：US20220413521A1
公开(公告)日：2022-12-29
申请号：US17847822
申请日：2022-06-23
摘要： In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.
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公开(公告)号：US20220276664A1
公开(公告)日：2022-09-01
申请号：US17637900
申请日：2020-07-03
发明人： Andrew PRICE
IPC分类号： G05D7/06
摘要： To provide a flow rate control valve that can improve responsiveness of flow rate control of a pressure differential type of a flow rate control device. The flow rate control valve is so configured to comprise a pair of valve members each of which has a seat surface being in contact with each other, to provide an internal flow channel that opens toward the seat surfaces and that passes through the inside of at least one of the valve members, and to control a flow rate of a fluid flowing out through the internal flow channel to the outside by adjusting a separation distance between the seat surfaces. And a restricted flow channel is formed in the internal flow channel so that a differential pressure is generated between an upstream side and a downstream side of the restricted flow channel.
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公开(公告)号：US20220228896A1
公开(公告)日：2022-07-21
申请号：US17571758
申请日：2022-01-10
发明人： Kazuya TOKUNAGA
摘要： The present invention controls convergent pressure of a closed space provided with a fluid resistance at high speed while an upstream valve provided on the upstream of the fluid resistance prevents overshooting. A pressure control system is provided with a fluid resistance in a channel forming a closed space and is configured to control pressure of the closed space by controlling an upstream valve provided on the upstream of the fluid resistance. The pressure control system includes a convergent pressure arithmetic unit and a valve controller. The convergent pressure arithmetic unit calculates convergent pressure of the closed space when the upstream valve is fully closed using at least one of upstream pressure and downstream pressure on the fluid resistance in the channel. The valve controller compares the calculated convergent pressure with a predetermined target convergent pressure and fully close the upstream valve based on the result of the comparison.
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4.发明申请公开(公告)号：US20220228665A1
公开(公告)日：2022-07-21
申请号：US17648093
申请日：2022-01-14
发明人： Kazuya SHAKUDO
摘要： To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.
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公开(公告)号：US20220163984A1
公开(公告)日：2022-05-26
申请号：US17455486
申请日：2021-11-18
发明人： Kazuya TOKUNAGA , Kotaro TAKIJIRI
摘要： A flow rate control apparatus can obtain a flow rate of a fluid passing through a downstream-side valve in a form in which noise is significantly reduced with little time delay, and has improved responsiveness. The flow rate control apparatus includes: a downstream-side valve flow rate meter that measures a downstream-side valve flow rate that is a flow rate of a fluid passing through a downstream-side valve; and an observer including a downstream-side valve flow rate estimation model that estimates the downstream-side valve flow rate on the basis of an input parameter that changes an opening degree of the downstream-side valve. The observer is configured so as to be fed back a deviation between the measured value of the downstream-side valve flow rate and the estimated value of the downstream-side valve flow rate.
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公开(公告)号：US11340635B2
公开(公告)日：2022-05-24
申请号：US16446934
申请日：2019-06-20
发明人： Kentaro Nagai
摘要： In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.
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公开(公告)号：US11291966B2
公开(公告)日：2022-04-05
申请号：US16217423
申请日：2018-12-12
发明人： Masanori Terasaka , Hidenori Oba
摘要： A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.
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公开(公告)号：US20220099561A1
公开(公告)日：2022-03-31
申请号：US17447605
申请日：2021-09-14
发明人： Toru SHIMIZU , Takeshi AKAMATSU
IPC分类号： G01N21/05 , G01N21/3504
摘要： The present invention reduces thermal stress that is generated in a join portion of a window material in an optical measurement cell, and is an optical measurement cell having translucent windows through which light is transmitted and into an interior of which is introduced a test sample. This optical measurement cell has a planar window material that forms the translucent windows, a join supporting portion that is joined to an outer edge portion of a main surface of the window material and supports the window material, and a low thermal expansion component that is provided on an outer-side circumferential surface of the join supporting portion and whose coefficient of thermal expansion is lower than a coefficient of thermal expansion of the join supporting portion.
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公开(公告)号：US20220083080A1
公开(公告)日：2022-03-17
申请号：US17447320
申请日：2021-09-10
发明人： Kazuya IMAI
摘要： In order to achieve an enlargement of a seating surface, and to additionally achieve an improvement in productivity while forming this seating surface using a resin layer, without having to sacrifice any of the drive range of the valve body, there is provided a fluid control valve that is formed such that drive force from an actuator is transmitted to a valve body via a plunger, and that controls a flow of a fluid by causing a seating surface of the valve body to move towards or away from a valve seat surface of a valve seat, wherein the valve body is a separate body from the plunger, and the seating surface is formed by a resin layer.
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公开(公告)号：US11270878B2
公开(公告)日：2022-03-08
申请号：US16953946
申请日：2020-11-20
摘要： A quadrupole mass spectrometer includes an ion source that ionizes a sample, a filter unit that includes a quadrupole and separates ions generated from the ion source according to mass, a detector that detects ions passing through the filter unit, a filter voltage controller that controls a filter voltage applied to the quadrupole to switch between a blocking mode in which ions entering the filter unit are not allowed to impinge on the detector and a passing mode in which ions entering the filter unit are allowed to impinge on the detector, the filter voltage including a radio-frequency voltage and a direct-current voltage, a baseline computing unit that computes a baseline based on outputs of the detector in the blocking mode, and an analyzing unit that outputs an analysis result of the sample based on outputs of the detector in the passing mode and the computed baseline.
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