发明授权
US08361372B2 Method of forming pattern and method of producing electronic element 失效
形成图案的方法和电子元件的制造方法

  • 专利标题: Method of forming pattern and method of producing electronic element
  • 专利标题(中): 形成图案的方法和电子元件的制造方法
  • 申请号: US12593846
    申请日: 2008-01-10
  • 公开(公告)号: US08361372B2
    公开(公告)日: 2013-01-29
  • 发明人: Toshio FukudaAkihiro Nomoto
  • 申请人: Toshio FukudaAkihiro Nomoto
  • 申请人地址: JP Tokyo
  • 专利权人: Sony Corporation
  • 当前专利权人: Sony Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: SNR Denton US LLP
  • 优先权: JP2007-092178 20070330
  • 国际申请: PCT/JP2008/050215 WO 20080110
  • 国际公布: WO2008/126425 WO 20081023
  • 主分类号: B29C41/46
  • IPC分类号: B29C41/46
Method of forming pattern and method of producing electronic element
摘要:
A method of forming a pattern and a method of producing an electronic element with which a fine and precise pattern is stably formed are provided. Each of the method of forming a pattern and the method of producing an electronic element includes a step of forming an electrically conductive film D by applying a liquid composition onto a first plate 10; a step of forming an electrically conductive pattern D′ on the first plate 10 by pressing a second plate 20 onto a surface side of the first plate 10, on which the electrically conductive film D is formed, to transfer an unwanted pattern of the electrically conductive film D to top faces of projections 20a of the second plate 20, thereby removing the unwanted pattern; and a step of transferring the electrically conductive pattern D′ by pressing the surface side of the first plate 10, on which the electrically conductive pattern D′ is formed, onto a surface of a transfer-receiving substrate, wherein when a surface tension of the surface of the first plate 10, onto which the liquid composition is applied, is represented by α, a dynamic surface tension of the liquid composition at 100 msec measured by a maximum bubble pressure method is represented by β, and a surface tension of the top faces of the projections 20a of the second plate 20 is represented by γ, the composition of the liquid composition or a material of the surface of the first plate 10 or the second plate 20 is set so as to satisfy γ>α≧β.
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