发明授权
US08370789B2 System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates
有权
半导体装置的设计系统,半导体装置的制造方法,半导体装置以及基板的接合方法
- 专利标题: System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates
- 专利标题(中): 半导体装置的设计系统,半导体装置的制造方法,半导体装置以及基板的接合方法
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申请号: US12879826申请日: 2010-09-10
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公开(公告)号: US08370789B2公开(公告)日: 2013-02-05
- 发明人: Isao Sugaya , Takahiro Horikoshi , Kazuya Okamoto
- 申请人: Isao Sugaya , Takahiro Horikoshi , Kazuya Okamoto
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2008-064924 20080313
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; B29C65/00 ; B29C65/78 ; B32B37/00 ; B32B41/00 ; B65C9/00
摘要:
The terminals that oppose each other when substrates are bonded are designed to be reliably joined. Comprised in a semiconductor device design system are a numerical value acquiring part, which acquires the respective numerical values of a plurality of calculation parameters, a junction estimating part, which, in the case in which a plurality of substrates has been pressed at a prescribed pressure so that the bump front end faces come into contact, estimates whether or not the respective mutually opposing bumps will be joined based on the respective numerical values of the calculation parameters acquired by the numerical value acquiring part, and a change processing part, which, in the case in which it has been estimated by the junction estimating part that any of the bumps will not be joined, gives a warning or performs processing so as to change the numerical value of at least one calculation parameter among the plurality of calculation parameters.
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