Invention Grant
US08371019B1 Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width
有权
用于制造具有直的侧壁和良好限定的轨道宽度的磁性写入极的方法
- Patent Title: Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width
- Patent Title (中): 用于制造具有直的侧壁和良好限定的轨道宽度的磁性写入极的方法
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Application No.: US13187370Application Date: 2011-07-20
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Publication No.: US08371019B1Publication Date: 2013-02-12
- Inventor: Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
- Applicant: Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Zilka-Kotab, PC
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00

Abstract:
A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
Public/Granted literature
- US20130019467A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE POLE HAVING STRAIGHT SIDE WALLS AND A WELL DEFINED TRACK-WIDTH Public/Granted day:2013-01-24
Information query
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