Invention Grant
US08371019B1 Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width 有权
用于制造具有直的侧壁和良好限定的轨道宽度的磁性写入极的方法

Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width
Abstract:
A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
Information query
Patent Agency Ranking
0/0