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1.发明授权Method for manufacturing a magnetic write pole having straight side walls and a well defined track-width 有权用于制造具有直的侧壁和良好限定的轨道宽度的磁性写入极的方法公开(公告)号：US08371019B1
公开(公告)日：2013-02-12
申请号：US13187370
申请日：2011-07-20
Applicant: Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
CPC classification number: G11B5/3116 , G11B5/3163 , G11B5/3169 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
Abstract translation: 一种用于制造具有非常窄的轨道宽度的写入极，直的明确定义的侧面和明确的后缘宽度（例如，轨道宽度）的磁性写入头的方法。 该方法包括使用在分开的CMP停止层处停止的两个单独的化学机械抛光工艺。 第一CMP停止层直接沉积在RIEable填充层上。 RIE掩模形成在填充层和第一CMP停止层上，RIE掩模具有开口。 然后在RIEable填充层中形成沟槽。 然后将第二CMP停止层沉积到沟槽中并在RIE掩模上方，然后电镀磁性材料。 然后执行第一和第二化学机械抛光工艺，首先在第一CMP停止时停止，在第二CMP停止时第二次停止。
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2.发明申请METHOD FOR MANUFACTURING A MAGNETIC WRITE POLE HAVING STRAIGHT SIDE WALLS AND A WELL DEFINED TRACK-WIDTH 有权用于制造具有直立侧壁和良好定义轨迹宽度的磁性写入点的方法公开(公告)号：US20130019467A1
公开(公告)日：2013-01-24
申请号：US13187370
申请日：2011-07-20
Applicant: Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Sue Siyang Zhang , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC: G11B33/00
CPC classification number: G11B5/3116 , G11B5/3163 , G11B5/3169 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
Abstract translation: 一种用于制造具有非常窄的轨道宽度的写入极，直的明确定义的侧面和明确的后缘宽度（例如，轨道宽度）的磁性写入头的方法。 该方法包括使用在分开的CMP停止层处停止的两个单独的化学机械抛光工艺。 第一CMP停止层直接沉积在RIEable填充层上。 RIE掩模形成在填充层和第一CMP停止层上，RIE掩模具有开口。 然后在RIEable填充层中形成沟槽。 然后将第二CMP停止层沉积到沟槽中并在RIE掩模上方，然后电镀磁性材料。 然后执行第一和第二化学机械抛光工艺，首先在第一CMP停止时停止，在第二CMP停止时第二次停止。
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3.发明授权Magnetic write head manufactured by an enhanced damascene process producing a tapered write pole with a non-magnetic spacer and non-magnetic bump 有权通过增强的镶嵌工艺制造的磁性写头，其产生具有非磁性间隔物和非磁性凸块的锥形写柱公开(公告)号：US08547660B2
公开(公告)日：2013-10-01
申请号：US12641251
申请日：2009-12-17
Applicant: Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC: G11B5/127
CPC classification number: G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
Abstract: A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
Abstract translation: 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。
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4.发明申请MAGNETIC WRITE HEAD MANUFACTURED BY AN ENHANCED DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC SPACER AND NON-MAGNETIC BUMP 有权通过增强的大面积工艺制造的磁性写头，用非磁性间隔器和非磁性块形成带状写入点公开(公告)号：US20110151279A1
公开(公告)日：2011-06-23
申请号：US12641251
申请日：2009-12-17
Applicant: Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC: G11B5/33
CPC classification number: G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
Abstract: A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
Abstract translation: 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。
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5.发明授权Method for manufacturing a magnetic write head having a wrap around shield that is magnetically coupled with a leading magnetic shield 有权一种用于制造具有与领先磁屏蔽磁耦合的围绕屏蔽的磁性写入头的方法公开(公告)号：US08201320B2
公开(公告)日：2012-06-19
申请号：US12641242
申请日：2009-12-17
Applicant: Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
CPC classification number: G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
Abstract: A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.
Abstract translation: 一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。 写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。
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Patent Agency Ranking
6.发明申请METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRAP AROUND SHIELD THAT IS MAGNETICALLY COUPLED WITH A LEADING MAGNETIC SHIELD 有权用于制造磁性写头的方法，该磁头具有与磁带的磁屏蔽磁耦合的磁带公开(公告)号：US20110146062A1
公开(公告)日：2011-06-23
申请号：US12641242
申请日：2009-12-17
Applicant: Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC: G11B5/127
CPC classification number: G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
Abstract: A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.
Abstract translation: 一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。 写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。
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7.发明申请MAGNETIC WRITE HEAD HAVING AN ELECTROPLATED WRITE POLE WITH A LEADING EDGE TAPER 审中-公开具有导线边缘的电镀写入磁头的磁头公开(公告)号：US20130020204A1
公开(公告)日：2013-01-24
申请号：US13187381
申请日：2011-07-20
Applicant: Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
Inventor： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
CPC classification number: C25D5/022 , C25D5/48 , G11B5/3116 , G11B5/3163
Abstract: A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.
Abstract translation: 一种用于制造具有锥形前缘的磁写头的方法。 该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。 然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。 然后通过化学机械抛光沉积和平坦化磁性材料。 剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。
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公开(公告)号：US20120127612A1
公开(公告)日：2012-05-24
申请号：US12954422
申请日：2010-11-24
Applicant: Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
Inventor： Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
CPC classification number: G11B5/3116 , G11B5/1278 , G11B5/3163
Abstract: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
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9.发明申请PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 失效具有导向边缘屏蔽（LES）和导线边缘（LET）的PMR写入的过程公开(公告)号：US20120125886A1
公开(公告)日：2012-05-24
申请号：US12954485
申请日：2010-11-24
Applicant: Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
Inventor： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
IPC: G01R1/16
CPC classification number: G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163
Abstract: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
Abstract translation: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极，将磁性材料沉积在平坦化表面上，形成图案化的抗蚀剂材料，并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。
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公开(公告)号：US08524095B2
公开(公告)日：2013-09-03
申请号：US12954485
申请日：2010-11-24
Applicant: Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
Inventor： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
IPC: B44C1/22
CPC classification number: G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163
Abstract: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
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