Invention Grant
US08373136B2 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
有权
消色差光束偏转器，消色差光束分离器，带电粒子装置，操作消色差光束偏转器的方法以及操作无色光束分离器的方法
- Patent Title: Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
- Patent Title (中): 消色差光束偏转器，消色差光束分离器，带电粒子装置，操作消色差光束偏转器的方法以及操作无色光束分离器的方法
-
Application No.: US12579869Application Date: 2009-10-15
-
Publication No.: US08373136B2Publication Date: 2013-02-12
- Inventor: Gerald Schoenecker , Stefan Lanio
- Applicant: Gerald Schoenecker , Stefan Lanio
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01J3/18
- IPC: H01J3/18 ; H01J3/20
Abstract:
An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.
Public/Granted literature
Information query
