公开(公告)号：US07335894B2

公开(公告)日：2008-02-26

申请号：US11274608

申请日：2005-11-15

申请人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

发明人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

IPC分类号： H01J37/244

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

摘要翻译： 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US20060151711A1

公开(公告)日：2006-07-13

申请号：US11274608

申请日：2005-11-15

申请人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

发明人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

IPC分类号： H01J1/50

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

摘要翻译： 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US09048068B2

公开(公告)日：2015-06-02

申请号：US12776980

申请日：2010-05-10

申请人： Stefan Lanio ,  Gerald Schoenecker

发明人： Stefan Lanio ,  Gerald Schoenecker

IPC分类号： H01J37/28 ,  H01J37/147 ,  H01J37/153

CPC分类号： H01J37/28 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/1523 ,  H01J2237/1534 ,  H01J2237/244

摘要： An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.

摘要翻译： 电子束装置包括：用于发射一次电子束的射束发射器; 用于将一次电子束聚焦到样本上的目标电子透镜，物镜限定光轴; 具有用于从一次电子束分离信号电子束的第一色散的光束分离器; 和色散补偿元件。 色散补偿元件具有第二色散，色散补偿元件适用于独立于色散补偿元件下游的主光束的倾斜角而调节第二色散，使得第二色散基本上补偿第一色散。 色散补偿元件沿着一级电子束布置在分束器的上游。

公开(公告)号：US08373136B2

公开(公告)日：2013-02-12

申请号：US12579869

申请日：2009-10-15

申请人： Gerald Schoenecker ,  Stefan Lanio

发明人： Gerald Schoenecker ,  Stefan Lanio

IPC分类号： H01J3/18 ,  H01J3/20

CPC分类号： H01J37/1472 ,  H01J2237/1508 ,  H01J2237/153

摘要： An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

摘要翻译： 提供了一种消色差束分离器装置，用于将初级带电粒子束与另一带电粒子束分离并在光轴（142）上提供初级带电粒子束，包括初级带电粒子束入口（134），初级带电粒子束 包括光轴的出口（132），适于产生磁场的磁偏转元件（163）和适于产生与磁场重叠的电场的静电偏转元件（165），其中，从 静电偏转元件和磁偏转元件被定位和/或定位以补偿八极杆的影响。

公开(公告)号：US08723117B2

公开(公告)日：2014-05-13

申请号：US13543593

申请日：2012-07-06

申请人： Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

发明人： Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/26

CPC分类号： H01J37/09 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。

公开(公告)号：US08481958B2

公开(公告)日：2013-07-09

申请号：US12856152

申请日：2010-08-13

申请人： Stefan Lanio

发明人： Stefan Lanio

IPC分类号： G21K5/04

CPC分类号： H01J37/141 ,  H01J2237/0453 ,  H01J2237/04922 ,  H01J2237/141

摘要： A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings for providing a respective first magnetic flux to the lens openings; and a compensation coil arranged between the lens openings for providing a respective second magnetic flux to at least some of the lens openings so as to compensate for an asymmetry of the first magnetic flux.

摘要翻译： 用于多个带电粒子束的透镜系统包括具有第一极靴，第二极靴和用于各个带电粒子束的多个透镜开口的透镜体; 布置在所述多个透镜开口周围的公共激励线圈，用于向所述透镜开口提供相应的第一磁通量; 以及补偿线圈，布置在透镜开口之间，用于向至少一些透镜开口提供相应的第二磁通量，以便补偿第一磁通量的不对称性。

公开(公告)号：US07439500B2

公开(公告)日：2008-10-21

申请号：US11384044

申请日：2006-03-17

申请人： Juergen Frosien ,  Stefan Lanio

发明人： Juergen Frosien ,  Stefan Lanio

IPC分类号： H01J37/244 ,  H01J37/05 ,  H01J49/48 ,  G01R31/305

CPC分类号： H01J37/05 ,  G01R31/305 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/26

摘要： The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.

摘要翻译： 本发明涉及具有改进的检测方案的分析系统和包括该分析系统的带电粒子束装置。 用于分析带电粒子束的分析系统具有分隔器，用于将带电粒子束根据其能量分成低能量束和高能量束; 用于检测高能束的前检测器; 以及用于检测低能量束的至少一个反向检测器。 分隔器位于前检测器和至少一个反向检测器之间，并且前分辨器和/或至少一个反向检测器被分段。

公开(公告)号：US20080135786A1

公开(公告)日：2008-06-12

申请号：US11923438

申请日：2007-10-24

申请人： Stefan Lanio ,  Reinhold Schmitt

发明人： Stefan Lanio ,  Reinhold Schmitt

IPC分类号： G21K1/04

CPC分类号： H01J37/09 ,  H01J2237/0455 ,  H01J2237/0458

摘要： A charged particle beam device is provided. The device includes an emitter for emitting a charged particle beam in a propagation direction essentially along an optical axis of the charged particle beam device, an aperture arrangement within the charged particle beam device. The aperture arrangement includes a first aperture element having a recess of the first aperture element, the first aperture element being movable in a first direction and with respect to the optical axis, a second aperture element having a recess of the second aperture element, the second aperture element being movable in essentially the first direction and with respect to the optical axis, a holder for holding the first aperture element and the second aperture element, a motion element adapted to move the first aperture element and the second aperture element with respect to the optical axis, and wherein the first aperture element and the second aperture element are displaced with respect to each other along the propagation direction, wherein the first aperture element and the second aperture element are movable in the first direction such that the recess of the first aperture element and the recess of the second aperture element form an aperture opening of a variable size.

摘要翻译： 提供带电粒子束装置。 该装置包括用于沿基本上沿着带电粒子束装置的光轴的传播方向发射带电粒子束的发射器，在带电粒子束装置内的孔布置。 所述孔布置包括具有所述第一孔元件的凹部的第一孔元件，所述第一孔元件可在第一方向上相对于所述光轴移动，第二孔元件具有所述第二孔元件的凹部，所述第二孔元件 孔元件可在基本上在第一方向上相对于光轴移动，用于保持第一孔眼元件和第二孔眼元件的保持器，适于相对于第一孔眼元件和第二孔元件移动第一孔眼元件和第二孔眼元件的运动元件 光轴，并且其中所述第一孔眼元件和所述第二孔眼元件沿着所述传播方向相对于彼此移位，其中所述第一孔眼元件和所述第二孔眼元件可沿所述第一方向移动，使得所述第一孔径的凹部 元件，并且第二孔元件的凹部形成可变尺寸的开口。

公开(公告)号：US06232601B1

公开(公告)日：2001-05-15

申请号：US09274665

申请日：1999-03-23

申请人： Reinhold Schmitt ,  Jürgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

发明人： Reinhold Schmitt ,  Jürgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC分类号： H01J37145

CPC分类号： H01J37/21 ,  H01J37/28

摘要： The invention relates to a charged particle beam device and a method for inspecting a specimen, comprising a source for generating a charged particle beam, an objective lens with an optical axis for focussing said charged particle beam on a specimen, which consists of a magnetic lens and a superimposed electrostatic lens having at least two electrodes, deflection means for deflecting said charged particle beam on said specimen and detector means for detecting charged particles released at said specimen. The invention is further characterized by control means co-acting with said deflection means and one of the electrodes of the electrostatic lens for applying a dynamic voltage to said electrode, the amount of the voltage being dependent on the distance of said charged particle beam from said optical axis at the specimen, in order to increase the efficiency of detecting said charged particles released at image areas being located on the specimen with distance from the optical axis.

摘要翻译： 本发明涉及一种带电粒子束装置和一种用于检查样本的方法，包括用于产生带电粒子束的源，具有用于将所述带电粒子束聚焦在样本上的光轴的物镜，该物镜由磁性透镜 以及具有至少两个电极的叠加的静电透镜，用于使所述带电粒子束偏转在所述样本上的偏转装置和用于检测在所述样本上释放的带电粒子的检测器装置。 本发明的特征还在于与所述偏转装置和静电透镜的一个电极共同作用的控制装置，用于向所述电极施加动态电压，所述电压的量取决于所述带电粒子束与所述电极的距离 以提高在与光轴的距离处位于样品上的图像区域处释放的带电粒子的检测效率。

公开(公告)号：US08963083B2

公开(公告)日：2015-02-24

申请号：US13960393

申请日：2013-08-06

申请人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

发明人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/26 ,  H01J37/21 ,  H01J37/10 ,  H01J37/147

CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。