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    Enhanced integrity projection lens assembly
    1.
    发明授权
    Enhanced integrity projection lens assembly 有权
    增强完整性投影镜头组合

    公开(公告)号：US08987679B2

    公开(公告)日：2015-03-24

    申请号：US13722873

    申请日：2012-12-20

    Applicant: Mapper Lithography IP B.V.

    Inventor： Johan Joost Koning ,  Stijn Willem Herman Steenbrink ,  Bart Schipper

    IPC: H01J37/12 ,  H01J3/18

    CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/15

    Abstract: The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode.

    Abstract translation: 本发明涉及一种用于将多个带电粒子子束引导到位于下游方向的图像平面上的投影透镜组合模块，以及用于组装这种投影透镜组件的方法。 特别地，本发明公开了一种具有增强的结构完整性和/或其最下游电极的放置精度提高的模块化投影透镜组件。

    GUN CONFIGURED TO GENERATE CHARGED PARTICLES
    3.
    发明申请
    GUN CONFIGURED TO GENERATE CHARGED PARTICLES 有权
    GUN配置生成充电颗粒

    公开(公告)号：US20140346368A1

    公开(公告)日：2014-11-27

    申请号：US14284128

    申请日：2014-05-21

    Applicant: NATIONAL UNIVERSITY OF SINGAPORE

    Inventor： Anjam KHURSHEED

    IPC: H01J3/18 ,  H01J3/20

    CPC classification number: H01J3/18 ,  H01J3/021 ,  H01J3/027 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/26 ,  H01J2237/06333 ,  H01J2237/0635 ,  H01J2237/1534

    Abstract: A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.

    Abstract translation: 一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差， 与透镜相关的平面几何像差。 还公开了相关方法。

    ELECTROSTATIC LENS AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
    4.
    发明申请
    ELECTROSTATIC LENS AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME 有权
    静电镜和充电颗粒光束装置使用它

    公开(公告)号：US20140224999A1

    公开(公告)日：2014-08-14

    申请号：US14348559

    申请日：2012-09-27

    Applicant: KYOCERA Corporation

    Inventor： Yukio Noguchi

    IPC: H01J37/12 ,  H01J37/30 ,  H01J3/18

    CPC classification number: H01J37/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J37/28 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/1205

    Abstract: To provide an electrostatic lens which improves an irradiation accuracy of an electron beam while satisfying the need for higher throughput. An electrostatic lens according to one embodiment of the present invention includes a substrate which includes an insulating plate in which a plurality of first through holes that allow an electron beam to pass through are formed, a plurality of electrodes that are formed on an inner wall of the plurality of first through holes, and a plurality of wirings that are formed on the insulating plate and are electrically connected to each of the electrodes, wherein the plurality of electrodes are electrically independent from each other.

    Abstract translation: 提供一种提高电子束的照射精度的静电透镜，同时满足更高的生产量。 根据本发明的一个实施例的静电透镜包括：基板，其包括绝缘板，其中形成有允许电子束穿过的多个第一通孔;多个电极，其形成在 多个第一通孔和多个布线，其形成在绝缘板上并与每个电极电连接，其中多个电极彼此电独立。

    APPARATUS FOR TREATING ION BEAM
    6.
    发明申请
    APPARATUS FOR TREATING ION BEAM 有权
    用于处理离子束的装置

    公开(公告)号：US20140110596A1

    公开(公告)日：2014-04-24

    申请号：US13658990

    申请日：2012-10-24

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

    Inventor： Shengwu Chang

    IPC: H01J3/18

    CPC classification number: H01J37/12 ,  H01J37/1474 ,  H01J37/3171 ,  H01J2237/121 ,  H01J2237/151

    Abstract: An ion beam scanning assembly includes a set of scanning electrodes defining a gap to accept an ion beam and scan the ion beam in a first plane, and a multipole electrostatic lens system comprising a plurality of electrodes arranged along a portion of a path of travel of the ion beam bounded by the pair of scanning electrodes, the multipole electrostatic lens system configured to shape the ion beam in a direction perpendicular to the first plane.

    Abstract translation: 离子束扫描组件包括一组扫描电极，其限定了间隙以接受离子束并在第一平面中扫描离子束;以及多极静电透镜系统，其包括多个电极，其沿着 所述离子束由所述一对扫描电极限定，所述多极静电透镜系统构造成在垂直于所述第一平面的方向上对所述离子束进行成形。

    HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
    7.
    发明申请
    HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION 审中-公开
    用于改进光束传输的混合静电透镜

    公开(公告)号：US20130256527A1

    公开(公告)日：2013-10-03

    申请号：US13800895

    申请日：2013-03-13

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

    Inventor： Shengwu Chang

    IPC: H01J3/18 ,  H01J49/06

    CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/067 ,  H01J2237/121

    Abstract: A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90° with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.

    Abstract translation: 使用混合静电透镜来形成和聚焦离子束。 混合静电透镜包括由具有第一和第二端的细长管和设置在第一端的第一电极和设置在第二端的第二电极限定的Einzel透镜。 细长管被配置为当离子束穿过混合静电透镜时，接收电压偏置以在Einzel透镜内产生电场。 混合静电透镜还包括具有第一阶段和第二阶段的四极透镜，其中每个阶段由相对于彼此转动90°的多个电极限定，以通过细长管限定沿Z方向的路径 。 Einzel透镜聚焦离子束，四极透镜成像离子束。

    CHARGED PARTICLE BEAM LENS AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
    8.
    发明申请
    CHARGED PARTICLE BEAM LENS AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS 失效
    充电颗粒光束透镜和充电颗粒光束曝光装置

    公开(公告)号：US20130206999A1

    公开(公告)日：2013-08-15

    申请号：US13744536

    申请日：2013-01-18

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Akira Shimazu

    IPC: H01J3/18 ,  H01J37/30

    CPC classification number: H01J3/18 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/022 ,  H01J2237/1205 ,  H01J2237/18

    Abstract: Provided is a charged particle beam lens, including: a first electrode on a downstream side and a second electrode on an upstream side in a travelling direction of a charged particle beam; a distance defining member provided between the first electrode and the second electrode such that the first electrode and the second electrode are placed away from each other; and a gap surrounded by the first electrode, the second electrode, and the distance defining member, in which: each of the first electrode and the second electrode has a first through hole formed therein, through which the charged particle beam passes; the second electrode further has a second through hole formed therein, through which the charged particle beam does not pass; and both the first through hole and the second through hole communicate to the gap.

    Abstract translation: 提供一种带电粒子束透镜，包括：下游侧的第一电极和带电粒子束的行进方向上游侧的第二电极; 设置在所述第一电极和所述第二电极之间的距离限定件，使得所述第一电极和所述第二电极彼此远离放置; 以及由第一电极，第二电极和距离限定部件围绕的间隙，其中：第一电极和第二电极中的每一个具有形成在其中的第一通孔，带电粒子束穿过该第一通孔; 第二电极还具有形成在其中的第二通孔，带电粒子束通过该第二通孔不通过; 并且第一通孔和第二通孔都与间隙连通。

    ELECTROSTATIC LENSES AND SYSTEMS INCLUDING THE SAME
    9.
    发明申请
    ELECTROSTATIC LENSES AND SYSTEMS INCLUDING THE SAME 有权
    静电镜和系统包括它们

    公开(公告)号：US20120223244A1

    公开(公告)日：2012-09-06

    申请号：US13410646

    申请日：2012-03-02

    Applicant: David G. Welkie

    Inventor： David G. Welkie

    IPC: H01J3/20 ,  H01J3/18

    CPC classification number: H01J49/061 ,  H01J37/12 ,  H01J37/1472 ,  H01J49/06 ,  H01J49/063 ,  H01J49/22 ,  H01J49/26

    Abstract: A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned with a first axis; a second electrode in the path between the first electrode and the detector, having a second aperture in the path and aligned with a second axis that is parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the electrodes. During operation, the potential generator applies potentials to the first, second and third electrodes so that the electrostatic lens directs a beam of charged particles from the source propagating along the first axis to propagate along the second axis.

    Abstract translation: 系统包括在带电粒子源和检测器之间的路径中的静电透镜。 静电透镜包括：第一电极，其具有与第一轴对准的路径中的第一孔; 所述第一电极和所述检测器之间的路径中的第二电极，在所述路径中具有第二孔，并且与第二轴对准，所述第二轴平行于所述第一轴线并沿着第一方向从所述第一轴线移位; 在第一电极和第二电极之间的路径中的第三电极; 以及耦合到电极的电位发生器。 在操作期间，电位发生器将电位施加到第一，第二和第三电极，使得静电透镜引导来自沿着第一轴传播的源的带电粒子束沿着第二轴传播。

    Efficient Atmospheric Pressure Interface for Mass Spectrometers and Method
    10.
    发明申请
    Efficient Atmospheric Pressure Interface for Mass Spectrometers and Method 有权
    用于质谱仪和方法的高效大气压力界面

    公开(公告)号：US20120161029A1

    公开(公告)日：2012-06-28

    申请号：US13413568

    申请日：2012-03-06

    Applicant: Alexander A. MAKAROV ,  Reinhold PESCH ,  Robert MALEK ,  Viacheslav KOZLOVSKIY

    Inventor： Alexander A. MAKAROV ,  Reinhold PESCH ,  Robert MALEK ,  Viacheslav KOZLOVSKIY

    IPC: H01J3/18 ,  H01J3/14

    CPC classification number: H01J49/062 ,  H01J3/14

    Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.

    Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括离子传递管道60.导管60具有朝向较高压力室40的入口开口和朝向较低压力室开口的出口70。 导管60还具有围绕离子传递通道115的至少一个侧壁。侧壁包括在侧壁的纵向方向上形成的多个孔140，以允许来自离子传递通道115内的气体流 到导管60的侧壁外侧的较低压力区域。

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