发明授权
- 专利标题： Seal ring support for backside illuminated image sensor
- 专利标题（中）： 背面照明图像传感器的密封环支撑
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申请号： US12986032申请日： 2011-01-06
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公开(公告)号： US08373243B2公开(公告)日： 2013-02-12
- 发明人: Hsin-Chih Tai , Vincent Venezia , Yin Qian , Duli Mao , Keh-Chiang Ku
- 申请人： Hsin-Chih Tai , Vincent Venezia , Yin Qian , Duli Mao , Keh-Chiang Ku
- 申请人地址： US CA Santa Clara
- 专利权人： OmniVision Technologies, Inc.
- 当前专利权人： OmniVision Technologies, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Blakely Sokoloff Taylor & Zafman LLP
- 主分类号： H01L31/12
- IPC分类号： H01L31/12
摘要：
A backside illuminated imaging sensor with a seal ring support includes an epitaxial layer having an imaging array formed in a front side of the epitaxial layer. A metal stack is coupled to the front side of the epitaxial layer, wherein the metal stack includes a seal ring formed in an edge region of the imaging sensor. An opening is included that extends from the back side of the epitaxial layer to a metal pad of the seal ring to expose the metal pad. The seal ring support is disposed on the metal pad and within the opening to structurally support the seal ring.
公开/授权文献
- US20120175722A1 SEAL RING SUPPORT FOR BACKSIDE ILLUMINATED IMAGE SENSOR 公开/授权日：2012-07-12
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