Invention Grant
US08373513B2 Compensated micro/nano-resonator with improved capacitive detection and method for producing same 有权
具有改进电容检测的补偿微/纳米谐振器及其制造方法

Compensated micro/nano-resonator with improved capacitive detection and method for producing same
Abstract:
The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.
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