Invention Grant
US08373513B2 Compensated micro/nano-resonator with improved capacitive detection and method for producing same
有权
具有改进电容检测的补偿微/纳米谐振器及其制造方法
- Patent Title: Compensated micro/nano-resonator with improved capacitive detection and method for producing same
- Patent Title (中): 具有改进电容检测的补偿微/纳米谐振器及其制造方法
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Application No.: US12965037Application Date: 2010-12-10
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Publication No.: US08373513B2Publication Date: 2013-02-12
- Inventor: Julien Arcamone , Eric Colinet
- Applicant: Julien Arcamone , Eric Colinet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0905974 20091210
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H01L41/047 ; H03H9/15

Abstract:
The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.
Public/Granted literature
- US20110140792A1 COMPENSATED MICRO/NANO-RESONATOR WITH IMPROVED CAPACITIVE DETECTION AND METHOD FOR PRODUCING SAME Public/Granted day:2011-06-16
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