发明授权
- 专利标题： Interdigitated vertical parallel capacitor
- 专利标题（中）： 交叉垂直并联电容器
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申请号： US12548484申请日： 2009-08-27
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公开(公告)号： US08378450B2公开(公告)日： 2013-02-19
- 发明人: Roger A. Booth, Jr. , Douglas D. Coolbaugh , Ebenezer E. Eshun , Zhong-Xiang He
- 申请人： Roger A. Booth, Jr. , Douglas D. Coolbaugh , Ebenezer E. Eshun , Zhong-Xiang He
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Scully, Scott, Murphy & Presser, P.C.
- 代理商 Katherine S. Brown
- 主分类号： H01L29/92
- IPC分类号： H01L29/92 ; H01L21/02
摘要：
An interdigitated structure may include at least one first metal line, at least one second metal line parallel to the at least one first metal line and separated from the at least one first metal line, and a third metal line contacting ends of the at least one first metal line and separated from the at least one second metal line. The at least one first metal line does not vertically contact any metal via and at least one second metal line may vertically contact at least one metal via. Multiple layers of interdigitated structure may be vertically stacked. Alternately, an interdigitated structure may include a plurality of first metal lines and a plurality of second metal lines, each metal line not vertically contacting any metal via. Multiple instances of interdigitated structure may be laterally replicated and adjoined, with or without rotation, and/or vertically stacked to form a capacitor.
公开/授权文献
- US20110049674A1 INTERDIGITATED VERTICAL PARALLEL CAPACITOR 公开/授权日：2011-03-03
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