Invention Grant
- Patent Title: Semiconductor device including vertical transistor and method for manufacturing the same
- Patent Title (中): 包括垂直晶体管的半导体器件及其制造方法
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Application No.: US12976792Application Date: 2010-12-22
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Publication No.: US08383477B2Publication Date: 2013-02-26
- Inventor: Kyoung Han Lee
- Applicant: Kyoung Han Lee
- Applicant Address: KR Icheon-Si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-Si
- Priority: KR10-2010-0067333 20100713
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/8242

Abstract:
A semiconductor device including a vertical transistor and a method for manufacturing the same may reduce a cell area in comparison with a conventional layout of 8F2 and 6F2. Also, the method does not require forming a bit line contact, a storage node contact or a landing plug, thereby decreasing the process steps. The semiconductor device including a vertical transistor comprises: an active region formed in a semiconductor substrate; a bit line disposed in the lower portion of the active region; a word line buried in the active region; and a capacitor disposed over the upper portion of the active region and the word line.
Public/Granted literature
- US20120012913A1 SEMICONDUCTOR DEVICE INCLUDING VERTICAL TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-01-19
Information query
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