Invention Grant
- Patent Title: Cross-section systems and methods
- Patent Title (中): 横截面系统和方法
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Application No.: US12994344Application Date: 2009-06-16
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Publication No.: US08384029B2Publication Date: 2013-02-26
- Inventor: Rainer Knippelmeyer , Lawrence Scipioni , Christoph Riedesel , John Morgan , Ulrich Mantz , Ulrich Wagemann
- Applicant: Rainer Knippelmeyer , Lawrence Scipioni , Christoph Riedesel , John Morgan , Ulrich Mantz , Ulrich Wagemann
- Applicant Address: US MA Peabody
- Assignee: Carl Zeiss NTS, LLC
- Current Assignee: Carl Zeiss NTS, LLC
- Current Assignee Address: US MA Peabody
- Agency: Fish & Richardson P.C.
- International Application: PCT/US2009/047474 WO 20090616
- International Announcement: WO2009/155272 WO 20091223
- Main IPC: G01N1/28
- IPC: G01N1/28 ; G01N23/00 ; H01L21/44
Abstract:
A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.
Public/Granted literature
- US20120085906A1 CROSS-SECTION SYSTEMS AND METHODS Public/Granted day:2012-04-12
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