Invention Grant
- Patent Title: Charged particle beam drawing apparatus and article manufacturing method using same
- Patent Title (中): 带电粒子束拉制装置及其制造方法
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Application No.: US13300032Application Date: 2011-11-18
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Publication No.: US08384051B2Publication Date: 2013-02-26
- Inventor: Kimitaka Ozawa
- Applicant: Kimitaka Ozawa
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-258550 20101119
- Main IPC: H01J3/07
- IPC: H01J3/07 ; H01J3/14 ; H01J3/26 ; G03F9/00

Abstract:
The drawing apparatus of the present inventions includes a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among a plurality of charged particle beams, and configured to detect an intensity of a charged particle beam incident thereon. A controller is configured to perform a control of a position of the detector and a control of a blanking deflector array such that one of two adjacent charged particle beams is in a blanking state and the other is in a non-blanking state on the detector that is moved, and each of the plurality of charged particle beams becomes in a blanking state and a non-blanking state sequentially, to cause the detector to perform an output in parallel with the control, and to inspect a defect in each blanking deflector in the blanking deflector array based on the output.
Public/Granted literature
- US20120126138A1 CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME Public/Granted day:2012-05-24
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