- 专利标题: Semiconductor device and method of manufacturing same
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申请号: US12627060申请日: 2009-11-30
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公开(公告)号: US08384160B2公开(公告)日: 2013-02-26
- 发明人: Kazuhiro Onishi , Kazuhiro Tsukamoto
- 申请人: Kazuhiro Onishi , Kazuhiro Tsukamoto
- 申请人地址: JP Tokyo
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2008-335656 20081229
- 主分类号: H01L21/70
- IPC分类号: H01L21/70
摘要:
To provide a semiconductor device and a method of manufacturing the same capable of suppressing, when a plurality of MIS transistors having different absolute values of threshold voltage is used, the reduction of the drive current of a MIS transistor having a greater absolute value of threshold voltage. The threshold voltage of a second nMIS transistor is greater than the threshold voltage of a first nMIS transistor and the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a second nMIS high-k film included in the second nMIS transistor is lower than the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a first nMIS high-k film included in the first nMIS transistor.
公开/授权文献
- US20100164007A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME 公开/授权日:2010-07-01