发明授权
- 专利标题: Micromechanical acceleration sensor having an open seismic mass
- 专利标题(中): 具有开放地震质量的微机械加速度传感器
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申请号: US12468501申请日: 2009-05-19
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公开(公告)号: US08393215B2公开(公告)日: 2013-03-12
- 发明人: Heiko Stahl , Dietrich Schubert , Lars Tebje
- 申请人: Heiko Stahl , Dietrich Schubert , Lars Tebje
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102008002606 20080624
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A micromechanical acceleration sensor having a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, in which the seismic mass is suspended over the substrate with the help of the suspension, the seismic mass has a mass center of gravity, the suspension has at least two anchors on the substrate, the two anchors are situated on opposite sides of the mass center of gravity, the distance between the two anchors being small compared to a horizontal extension of the seismic mass, the two anchors determine a central axis, the seismic mass have recesses which are situated on opposite sides of the central axis and are laterally open outward on the sides facing away from the central axis, and the stationary electrodes at least engage in the recesses of the seismic mass.
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