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US08394659B1 Nitrogen reactive sputtering of Cu-In-Ga-N for solar cells 失效
用于太阳能电池的Cu-In-Ga-N的氮反应溅射

Nitrogen reactive sputtering of Cu-In-Ga-N for solar cells
Abstract:
Methods for forming Cu—In—Ga—N (CIGN) layers for use in TFPV solar panels are described using reactive PVD deposition in a nitrogen containing atmosphere. In some embodiments, the CIGN layers can be used as an absorber layer and eliminate the need of a selenization step. In some embodiments, the CIGN layers can be used as a protective layer to decrease the sensitivity of the CIG layer to oxygen or moisture before the selenization step. In some embodiments, the CIGN layers can be used as an adhesion layer to improve the adhesion between the back contact layer and the absorber layer.
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