Invention Grant
US08397574B2 Ultrasonic transducer, ultrasonic probe, and ultrasonic imaging device 有权
超声波换能器,超声波探头和超声波成像装置

Ultrasonic transducer, ultrasonic probe, and ultrasonic imaging device
Abstract:
An ultrasonic transducer (100) includes a substrate (1) having a first electrode therein or on a surface thereof and a diaphragm (5) having a second electrode therein or on a surface thereof, with a cavity (4) therebetween. Further, at least one beam (7) is provided on a surface or inside of the diaphragm (5) or the second electrode.
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