公开(公告)号：US08397574B2

公开(公告)日：2013-03-19

申请号：US12064158

申请日：2006-08-02

申请人： Hiroki Tanaka ,  Takashi Azuma ,  Hiroshi Fukuda

发明人： Hiroki Tanaka ,  Takashi Azuma ,  Hiroshi Fukuda

IPC分类号： G01N29/24

CPC分类号： B06B1/0292

摘要： An ultrasonic transducer (100) includes a substrate (1) having a first electrode therein or on a surface thereof and a diaphragm (5) having a second electrode therein or on a surface thereof, with a cavity (4) therebetween. Further, at least one beam (7) is provided on a surface or inside of the diaphragm (5) or the second electrode.

摘要翻译： 超声换能器（100）包括其中具有第一电极或其表面的基板（1）和在其中具有第二电极或其表面的隔膜（5），其间具有空腔（4）。 此外，在隔膜（5）或第二电极的表面或内部设置至少一个光束（7）。

公开(公告)号：US20090301200A1

公开(公告)日：2009-12-10

申请号：US12064158

申请日：2006-08-02

申请人： Hiroki Tanaka ,  Takashi Azuma ,  Hiroshi Fukuda

发明人： Hiroki Tanaka ,  Takashi Azuma ,  Hiroshi Fukuda

IPC分类号： G01N29/24

CPC分类号： B06B1/0292

摘要： An ultrasonic transducer (100) includes a substrate (1) having a first electrode therein or on a surface thereof and a diaphragm (5) having a second electrode therein or on a surface thereof, with a cavity (4) therebetween. Further, at least one beam (7) is provided on a surface or inside of the diaphragm (5) or the second electrode.

摘要翻译： 超声换能器（100）包括其中具有第一电极或其表面的基板（1）和在其中具有第二电极或其表面的隔膜（5），其间具有空腔（4）。 此外，在隔膜（5）或第二电极的表面或内部设置至少一个光束（7）。

公开(公告)号：US07817811B2

公开(公告)日：2010-10-19

申请号：US11341655

申请日：2006-01-30

申请人： Shinichiro Umemura ,  Takashi Azuma ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Toshiyuki Mine ,  Syuntaro Machida

发明人： Shinichiro Umemura ,  Takashi Azuma ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Toshiyuki Mine ,  Syuntaro Machida

IPC分类号： H04R25/00

CPC分类号： B06B1/0292

摘要： The present invention aims to stabilize sound-electricity conversion characteristics of a diaphragm-type sound-electricity conversion device as well as to decrease the noise level of an ultrasonic diagnostic apparatus using the sound-electricity conversion device. The sound-electricity conversion device is configured by a capacitor cell including a lower electrode formed on a silicon substrate and an upper electrode over the lower electrode, the lower and upper electrodes sandwiching a cavity. An electrode short-circuit prevention film is formed on the upper electrode on the cavity side. The electrode short-circuit prevention film is formed of a material with an electrical time constant shorter than 1 second and longer than 10 microseconds, such as silicon nitride containing a stoichiometrically excessive amount of silicon. As a result, the electrode short-circuit prevention film has small electric conductivity, and thus it is made possible to prevent the film from being charged with electric charge and to avoid the drift of the electric charge. Consequently, the sound-electricity conversion characteristics of the sound-electricity conversion device stabilize, and further the sound noise level of the ultrasonic diagnostic apparatus decreases.

摘要翻译： 本发明旨在稳定隔膜式声电转换装置的声电转换特性，并且降低使用声电转换装置的超声波诊断装置的噪声水平。 声电转换装置由包括形成在硅基板上的下电极和下电极上的上电极的电容器单元构成，下电极和上电极夹着空腔。 在空腔侧的上部电极上形成电极短路防止膜。 电极短路防止膜由电气时间常数短于1秒且长于10微秒的材料形成，例如含有化学计量过量的硅的氮化硅。 结果，电极短路防止膜具有小的导电性，因此可以防止膜被充电并避免电荷的漂移。 因此，声电转换装置的声电转换特性稳定，超声波诊断装置的声音噪声水平进一步降低。

公开(公告)号：US20090301199A1

公开(公告)日：2009-12-10

申请号：US11996532

申请日：2006-01-30

申请人： Takashi Azuma ,  Shinichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

发明人： Takashi Azuma ,  Shinichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

IPC分类号： G01N29/34 ,  H02N1/08

CPC分类号： A61B8/4483 ,  A61B8/08 ,  A61B8/4281 ,  B06B1/0292 ,  G01N29/2431 ,  G01S15/00

摘要： The receive sensitivity of an ultrasound array transducer structured with a diaphragm electro-acoustic transducer (101) being a basic unit is affected by change in a charge amount with elapsed time due to leakage or the like, which causes drift of the primary beam sensitivity, degradation in the acoustic SN ratio due to a rise in the acoustic noise level, and degradation in the directivity of an ultrasound beam. To addressing this problem, a charge controller (charge monitor 211) is provided to control charge in an electro-acoustic transducer (101). A charge monitoring section (102) monitors the change in the charge amount. When change in the charge amount is small, transmit sensitivity or receive sensitivity is calibrated by a controller (104) by, for example, multiplying a receive signal by a calibration coefficient corresponding to the change amount. Further, when the change in the charge amount is large, for example, charges can be re-emitted from a charge emitter (103). The series of operations is controlled by the controller (104), and thus sensitivity variation caused by difference in the changes with elapsed time, particularly between the plural transducers, is calibrated.

摘要翻译： 由作为基本单元的隔膜电声换能器（101）构成的超声波阵列换能器的接收灵敏度受到由于泄漏等引起的经过时间的电荷量的变化的影响，导致主光束灵敏度的漂移， 由于声学噪声水平的上升引起的声学SN比的降低，以及超声波束的方向性的劣化。 为了解决这个问题，提供一种充电控制器（充电监视器211）来控制电声换能器（101）中的电荷。 充电监视部（102）监视充电量的变化。 当充电量的变化小时，通过例如将接收信号乘以对应于变化量的校准系数，由控制器（104）校准发射灵敏度或接收灵敏度。 此外，当电荷量的变化大时，例如，电荷可以从电荷发射体（103）重新发射。 一系列操作由控制器（104）控制，因此校正了由于经过时间的变化，特别是多个换能器之间的差异引起的灵敏度变化。

公开(公告)号：US20070068266A1

公开(公告)日：2007-03-29

申请号：US11492961

申请日：2006-07-26

申请人： Tsukasa Fujimori ,  Natsuki Yokoyama ,  Hiroshi Fukuda ,  Yuko Hanaoka ,  Takashi Azuma

发明人： Tsukasa Fujimori ,  Natsuki Yokoyama ,  Hiroshi Fukuda ,  Yuko Hanaoka ,  Takashi Azuma

IPC分类号： G01L9/12

CPC分类号： G01L9/0073 ,  B60C23/0408 ,  G01D5/2417 ,  G01L9/12 ,  G01L27/007

摘要： A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacitor into a voltage, and a control signal generation circuit for generating a plurality of control signals. The capacitor has a frequency-capacitance characteristic with a resonant frequency. In a measurement of the physical quantity, the capacitance of the capacitor is measured with one of the control signals having a first frequency which is much higher or much lower than the resonant frequency. In a self-diagnosis of the sensor, the capacitance of the capacitor is measured with another one of the control signals having a second frequency which is equal or close to the resonant frequency.

摘要翻译： 公开了具有小功耗和高可靠性的传感器和传感器模块。 传感器包括具有物理量变化的电容的电容器，用于将电容器的电容转换为电压的电容 - 电压转换电路，以及用于产生多个控制信号的控制信号产生电路。 电容器具有谐振频率的频率 - 电容特性。 在物理量的测量中，电容器的电容被测量，其中一个控制信号具有比谐振频率高得多或低得多的第一频率。 在传感器的自诊断中，电容器的电容用另一个控制信号测量，其中第二频率等于或接近谐振频率。

公开(公告)号：US20060284519A1

公开(公告)日：2006-12-21

申请号：US11341655

申请日：2006-01-30

申请人： Shinichiro Umemura ,  Takashi Azuma ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Toshiyuki Mine ,  Syuntaro Machida

发明人： Shinichiro Umemura ,  Takashi Azuma ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Toshiyuki Mine ,  Syuntaro Machida

IPC分类号： H01L41/00

CPC分类号： B06B1/0292

摘要： The present invention aims to stabilize sound-electricity conversion characteristics of a diaphragm-type sound-electricity conversion device as well as to decrease the noise level of an ultrasonic diagnostic apparatus using the sound-electricity conversion device. The sound-electricity conversion device is configured by a capacitor cell including a lower electrode formed on a silicon substrate and an upper electrode over the lower electrode, the lower and upper electrodes sandwiching a cavity. An electrode short-circuit prevention film is formed on the upper electrode on the cavity side. The electrode short-circuit prevention film is formed of a material with an electrical time constant shorter than 1 second and longer than 10 microseconds, such as silicon nitride containing a stoichiometrically excessive amount of silicon. As a result, the electrode short-circuit prevention film has small electric conductivity, and thus it is made possible to prevent the film from being charged with electric charge and to avoid the drift of the electric charge. Consequently, the sound-electricity conversion characteristics of the sound-electricity conversion device stabilize, and further the sound noise level of the ultrasonic diagnostic apparatus decreases.

摘要翻译： 本发明旨在稳定隔膜式声电转换装置的声电转换特性，并且降低使用声电转换装置的超声波诊断装置的噪声水平。 声电转换装置由包括形成在硅基板上的下电极和下电极上的上电极的电容器单元构成，下电极和上电极夹着空腔。 在空腔侧的上部电极上形成电极短路防止膜。 电极短路防止膜由电气时间常数短于1秒且长于10微秒的材料形成，例如含有化学计量过量的硅的氮化硅。 结果，电极短路防止膜具有小的导电性，因此可以防止膜被充电并避免电荷的漂移。 因此，声电转换装置的声电转换特性稳定，超声波诊断装置的声音噪声水平进一步降低。

公开(公告)号：US07325457B2

公开(公告)日：2008-02-05

申请号：US11492961

申请日：2006-07-26

申请人： Tsukasa Fujimori ,  Natsuki Yokoyama ,  Hiroshi Fukuda ,  Yuko Hanaoka ,  Takashi Azuma

发明人： Tsukasa Fujimori ,  Natsuki Yokoyama ,  Hiroshi Fukuda ,  Yuko Hanaoka ,  Takashi Azuma

IPC分类号： G01L9/12

CPC分类号： G01L9/0073 ,  B60C23/0408 ,  G01D5/2417 ,  G01L9/12 ,  G01L27/007

摘要： A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacitor into a voltage, and a control signal generation circuit for generating a plurality of control signals. The capacitor has a frequency-capacitance characteristic with a resonant frequency. In a measurement of the physical quantity, the capacitance of the capacitor is measured with one of the control signals having a first frequency which is much higher or much lower than the resonant frequency. In a self-diagnosis of the sensor, the capacitance of the capacitor is measured with another one of the control signals having a second frequency which is equal or close to the resonant frequency.

摘要翻译： 公开了具有小功耗和高可靠性的传感器和传感器模块。 传感器包括具有物理量变化的电容的电容器，用于将电容器的电容转换为电压的电容 - 电压转换电路，以及用于产生多个控制信号的控制信号产生电路。 电容器具有谐振频率的频率 - 电容特性。 在物理量的测量中，电容器的电容被测量，其中一个控制信号具有比谐振频率高得多或低得多的第一频率。 在传感器的自诊断中，电容器的电容用另一个控制信号测量，其中第二频率等于或接近谐振频率。

公开(公告)号：US08132462B2

公开(公告)日：2012-03-13

申请号：US11996532

申请日：2006-01-30

申请人： Takashi Azuma ,  Shinichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

发明人： Takashi Azuma ,  Shinichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

IPC分类号： G01N29/34 ,  H02N1/08

CPC分类号： A61B8/4483 ,  A61B8/08 ,  A61B8/4281 ,  B06B1/0292 ,  G01N29/2431 ,  G01S15/00

摘要： The receive sensitivity of an ultrasound array transducer structured with a diaphragm electro-acoustic transducer (101) being a basic unit is affected by change in a charge amount with elapsed time due to leakage or the like, which causes drift of the primary beam sensitivity, degradation in the acoustic SN ratio due to a rise in the acoustic noise level, and degradation in the directivity of an ultrasound beam. To addressing this problem, a charge controller (charge monitor 211) is provided to control charge in an electro-acoustic transducer (101). A charge monitoring section (102) monitors the change in the charge amount. When change in the charge amount is small, transmit sensitivity or receive sensitivity is calibrated by a controller (104) by, for example, multiplying a receive signal by a calibration coefficient corresponding to the change amount. Further, when the change in the charge amount is large, for example, charges can be re-emitted from a charge emitter (103).

摘要翻译： 由作为基本单元的隔膜电声换能器（101）构成的超声波阵列换能器的接收灵敏度受到由于泄漏等引起的经过时间的电荷量的变化的影响，导致主光束灵敏度的漂移， 由于声学噪声水平的上升引起的声学SN比的降低，以及超声波束的方向性的劣化。 为了解决这个问题，提供一种充电控制器（充电监视器211）来控制电声换能器（101）中的电荷。 充电监视部（102）监视充电量的变化。 当充电量的变化小时，通过例如将接收信号乘以对应于变化量的校准系数，由控制器（104）校准发射灵敏度或接收灵敏度。 此外，当电荷量的变化大时，例如，电荷可以从电荷发射体（103）重新发射。

公开(公告)号：US07860258B2

公开(公告)日：2010-12-28

申请号：US11491198

申请日：2006-07-24

申请人： Takashi Azuma ,  Shin-ichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

发明人： Takashi Azuma ,  Shin-ichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

IPC分类号： H04R25/00

CPC分类号： B06B1/0292 ,  H04R19/005

摘要： A transducer for transmitting and receiving ultrasonic waves to a diaphragm-based ultrasonic transducer device using silicon as a base material. An electro-acoustic transducer device which can have a first electrode formed on top of, or inside, a substrate and having a thin film provided on top of the substrate. The device can also have a second electrode formed on top of, or inside, the thin film. A void layer can be provided between the first electrode and the second electrode. A charge-storage layer can be provided between the first electrode and the second electrode. A source electrode and a drain electrode can also be provided for measuring a quantity of electricity stored in the charge-storage layer.

摘要翻译： 一种用于将超声波发送和接收到使用硅作为基材的基于隔膜的超声波换能器装置的换能器。 一种电声换能器装置，其可以具有形成在基板的顶部或内部并且具有设置在基板顶部上的薄膜的第一电极。 该器件还可以具有形成在薄膜的顶部或内部的第二电极。 可以在第一电极和第二电极之间设置空隙层。 可以在第一电极和第二电极之间设置电荷存储层。 还可以提供源电极和漏电极来测量存储在电荷存储层中的电量。

公开(公告)号：US20070057603A1

公开(公告)日：2007-03-15

申请号：US11491198

申请日：2006-07-24

申请人： Takashi Azuma ,  Shin-ichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

发明人： Takashi Azuma ,  Shin-ichiro Umemura ,  Tatsuya Nagata ,  Hiroshi Fukuda ,  Shuntaro Machida ,  Toshiyuki Mine

IPC分类号： H01L41/09

CPC分类号： B06B1/0292 ,  H04R19/005

摘要： In a semiconductor diaphragm type electro-acoustic transducer device having no necessity for a DC bias voltage applied as a result of a charge-stored layer being provide between electrodes, electro-mechanical conversion efficiency undergoes a change owing to time-dependent change in a quantity of stored electricity due to leakage of charge, and so forth. As for sensitivity of signal reception, provided by an ultrasonic array-transducer made up of the electro-acoustic transducer devices each as a basic unit, not only a main beam sensitivity undergoes drift as a result of drift in the electromechanical conversion efficiency, but also there result deterioration in an acoustic S/N ratio, and deterioration in directionality of an ultrasonic beam. In order to resolve those problems, there is provided an electro-acoustic transducer device comprising a first electrode formed on top of, or inside a substrate, a thin film using silicon or a silicon compound as a base material thereof, provided on top of the substrate, a second electrode formed on top of, or inside the thin film, a void layer provided between the first electrode and the second electrode, a charge-stored layer for storing charge given by the first electrode and the second electrode, provided between the first electrode and the second electrode, and a source electrode and a drain electrode, for measuring a quantity of electricity stored in the charge-storage layer.

摘要翻译： 在半导体膜式电声换能器装置中，由于在电极之间提供电荷存储层，所以不需要施加直流偏置电压，电 - 机转换效率由于时间上的变化而发生变化 由于电荷泄漏而导致的储存电力等。 对于由作为基本单元的电声换能器构成的超声波阵列换能器提供的信号接收的灵敏度，由于机电转换效率的漂移，主光束的灵敏度不但会发生漂移， 导致声S / N比的恶化，超声波束的方向性劣化。 为了解决这些问题，提供了一种电声换能器装置，其包括在基板之上或之内形成的第一电极，使用硅或硅化合物作为其基材的薄膜，其设置在 基板，形成在薄膜的上面或内部的第二电极，设置在第一电极和第二电极之间的空隙层，用于存储由第一电极和第二电极给出的电荷的电荷存储层， 第一电极和第二电极以及源电极和漏电极，用于测量存储在电荷存储层中的电量。