发明授权
US08399852B2 Systems and methods for control of multiple charged particle beams
有权
用于控制多个带电粒子束的系统和方法
- 专利标题： Systems and methods for control of multiple charged particle beams
- 专利标题（中）： 用于控制多个带电粒子束的系统和方法
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申请号： US13303941申请日： 2011-11-23
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公开(公告)号： US08399852B2公开(公告)日： 2013-03-19
- 发明人: Alexander Klein , Matthew Wittman , Scott Rackey
- 申请人： Alexander Klein , Matthew Wittman , Scott Rackey
- 申请人地址： TH Chiang Mai, Chiang Mai US NY New York
- 专利权人： Alexander Klein,Matthew Wittman
- 当前专利权人： Alexander Klein,Matthew Wittman
- 当前专利权人地址： TH Chiang Mai, Chiang Mai US NY New York
- 代理机构： Choate, Hall & Stewart LLP
- 主分类号： H01J3/07
- IPC分类号： H01J3/07 ; H01J3/14 ; H01J3/18 ; H01J3/20 ; H01J27/51
摘要：
The systems and methods described herein relate to the use of electrostatic elements or combinations of electrostatic and magnetic elements to confine charged particles in stable recirculating, trapped orbits. More particularly, the invention relates to systems and methods for acceleration and focusing of multiple charged particle beams having multiple energies and arbitrary polarities along a common axis.
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