Invention Grant
US08399852B2 Systems and methods for control of multiple charged particle beams
有权
用于控制多个带电粒子束的系统和方法
- Patent Title: Systems and methods for control of multiple charged particle beams
- Patent Title (中): 用于控制多个带电粒子束的系统和方法
-
Application No.: US13303941Application Date: 2011-11-23
-
Publication No.: US08399852B2Publication Date: 2013-03-19
- Inventor: Alexander Klein , Matthew Wittman , Scott Rackey
- Applicant: Alexander Klein , Matthew Wittman , Scott Rackey
- Applicant Address: TH Chiang Mai, Chiang Mai US NY New York
- Assignee: Alexander Klein,Matthew Wittman
- Current Assignee: Alexander Klein,Matthew Wittman
- Current Assignee Address: TH Chiang Mai, Chiang Mai US NY New York
- Agency: Choate, Hall & Stewart LLP
- Main IPC: H01J3/07
- IPC: H01J3/07 ; H01J3/14 ; H01J3/18 ; H01J3/20 ; H01J27/51
Abstract:
The systems and methods described herein relate to the use of electrostatic elements or combinations of electrostatic and magnetic elements to confine charged particles in stable recirculating, trapped orbits. More particularly, the invention relates to systems and methods for acceleration and focusing of multiple charged particle beams having multiple energies and arbitrary polarities along a common axis.
Public/Granted literature
- US20120187306A1 Systems and Methods for Control of Multiple Charged Particle Beams Public/Granted day:2012-07-26
Information query
