- 专利标题: Thin film transistor and manufacturing method thereof
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申请号: US13336292申请日: 2011-12-23
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公开(公告)号: US08399887B2公开(公告)日: 2013-03-19
- 发明人: Yoshiharu Hirakata , Yukie Nemoto
- 申请人: Yoshiharu Hirakata , Yukie Nemoto
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office, P.C.
- 代理商 Eric J. Robinson
- 优先权: JP2003-076640 20030319
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
The present invention provides a structure of the TFT in which a current-voltage characteristic can be improved. The present invention refers to a thin film transistor comprising a lamination layer wherein a first conductive film, a first insulating film and a second conductive film are sequentially laminated, a semiconductor film formed so as to be in contact with the side surface of the lamination layer, and a third conductive film covering the semiconductor film through a second insulating film. The first conductive film and the second conductive film are a source electrode and a drain electrode, and a region which is in contact with the first insulating film and the third conductive film is a channel forming region in semiconductor film, and the third conductive film is a gate electrode.
公开/授权文献
- US20120112196A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF 公开/授权日:2012-05-10
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