发明授权
US08404302B2 Solution process for fabricating a textured transparent conductive oxide (TCO)
失效
用于制造纹理透明导电氧化物（TCO）的溶液工艺
- 专利标题： Solution process for fabricating a textured transparent conductive oxide (TCO)
- 专利标题（中）： 用于制造纹理透明导电氧化物（TCO）的溶液工艺
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申请号： US12836300申请日： 2010-07-14
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公开(公告)号： US08404302B2公开(公告)日： 2013-03-26
- 发明人: Jer-shen Maa , Gregory S. Herman , Apostolos T. Voutsas
- 申请人： Jer-shen Maa , Gregory S. Herman , Apostolos T. Voutsas
- 申请人地址： US WA Camas
- 专利权人： Sharp Laboratories of America, Inc.
- 当前专利权人： Sharp Laboratories of America, Inc.
- 当前专利权人地址： US WA Camas
- 代理机构： Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号： B05D3/02
- IPC分类号： B05D3/02 ; B05D5/06 ; B05D5/12 ; H05H1/00
摘要：
A solution process is provided for forming a textured transparent conductive oxide (TCO) film. The process provides a substrate, and forms a first layer on the substrate of metal oxide nanoparticles such as ZnO, In2O3, or SnO2. The metal oxide nanoparticles have a faceted structure with an average size greater than 100 nanometers (nm). Voids between the metal oxide nanoparticles have a size about equal to the size of the metal oxide nanoparticles. Then, a second layer is formed overlaying the first layer, filling the voids between the nanoparticles of the first layer, and completely covering the substrate. The result is a continuous TCO film having an average surface roughness that is created by the combination of first and second layers.
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