Invention Grant
- Patent Title: Porous member
- Patent Title (中): 多孔成员
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Application No.: US12677182Application Date: 2009-02-23
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Publication No.: US08409482B2Publication Date: 2013-04-02
- Inventor: Jiro Higashijima , Satoshi Kaneko
- Applicant: Jiro Higashijima , Satoshi Kaneko
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown
- Priority: JP2008-053530 20080304
- International Application: PCT/JP2009/053189 WO 20090223
- International Announcement: WO2009/110342 WO 20090911
- Main IPC: B29C65/00
- IPC: B29C65/00 ; B29C67/20 ; B01D39/00
Abstract:
According to one embodiment of the present invention, there is provided a porous member formed by providing a member formed of a fluororesin containing carbon fiber and having a predetermined shape and exposing the member to an oxidizing gas to remove the carbon fiber contained in the member.
Public/Granted literature
- US20110011793A1 POROUS MEMBER Public/Granted day:2011-01-20
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