利索-全球专利检索

  1. 登录
  2. 注册
发明授权
US08409922B2 Semiconductor device and method of forming leadframe interposer over semiconductor die and TSV substrate for vertical electrical interconnect 有权
在半导体管芯上形成引线框架插入件的半导体器件和方法以及用于垂直电互连的TSV衬底

Semiconductor device and method of forming leadframe interposer over semiconductor die and TSV substrate for vertical electrical interconnect
摘要：
A semiconductor device has a substrate with a plurality of conductive vias formed through the substrate and first conductive layer formed over the substrate. A first semiconductor die is mounted over the substrate. A second semiconductor die can be mounted over the first semiconductor die. A leadframe interposer has a base plate and a plurality of base leads extending from the base plate. An etch-resistant conductive layer is formed over a surface of the base plate opposite the base leads. The leadframe is mounted to the substrate over the first semiconductor die. An encapsulant is deposited over the substrate and first semiconductor die. The base plate is removed while retaining the etch-resistant conductive layer and portion of the base plate opposite the base leads to electrically isolate the base leads. An interconnect structure is formed over a surface of the substrate opposite the base leads.
摘要（中）：

半导体器件具有衬底，其具有通过衬底形成的多个导电通孔和形成在衬底上的第一导电层。 第一半导体管芯安装在衬底上。 第二半导体管芯可以安装在第一半导体管芯上。 引线框架插入件具有基板和从基板延伸的多个基底引线。 在与基极相对的基板的表面上形成耐蚀刻导电层。 引线框架安装在第一半导体管芯上的衬底上。 密封剂沉积在衬底和第一半导体管芯上。 去除基板，同时保持耐蚀刻导电层，并且基板的与基底引线相对的部分电绝缘基极。 在与基极相对的基板的表面上形成互连结构。

公开/授权文献
信息查询
Espacenet
0/0