发明授权
- 专利标题: Bidirectional, out-of-plane, comb drive accelerometer
- 专利标题(中): 双向,平面外,梳齿驱动加速度计
-
申请号: US12492915申请日: 2009-06-26
-
公开(公告)号: US08418555B2公开(公告)日: 2013-04-16
- 发明人: Michael Foster , Shifang Zhou
- 申请人: Michael Foster , Shifang Zhou
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Lowe Graham Jones PLLC
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A bi-directional, out-of-plane electrostatic comb drive apparatus including two electrically independent sets of stator comb tines; and a method for fabricating an out-of-plane comb drive with stacked sets of stator comb tines. A first set of stator comb tines is offset from a second set of stator comb tines. A set of rotor comb tines interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor tines toward the second set of stator comb tines, enabling bi-directional operation. A fabrication method is disclosed that enables fabrication of the first and second sets of stator comb tines that are mechanically and electrically independent and interleaved by the rotor comb tines.
公开/授权文献
- US20100326191A1 BIDIRECTIONAL, OUT-OF-PLANE, COMB DRIVE ACCELEROMETER 公开/授权日:2010-12-30
信息查询
IPC分类: