发明授权
- 专利标题: Electroplating head and method for operating the same
- 专利标题(中): 电镀头及其操作方法
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申请号: US12482171申请日: 2009-06-10
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公开(公告)号: US08419917B2公开(公告)日: 2013-04-16
- 发明人: Yezdi Dordi , Bob Maraschin , John Boyd , Fred C. Redeker
- 申请人: Yezdi Dordi , Bob Maraschin , John Boyd , Fred C. Redeker
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: C25D5/20
- IPC分类号: C25D5/20 ; C25D5/02 ; C25D5/00
摘要:
An electroplating head is disposed above and proximate to an upper surface of a wafer. Cations are transferred from an anode to an electroplating solution within the electroplating head. The electroplating solution flows downward through a porous electrically resistive material at an exit of the electroplating head to be disposed on the upper surface of the wafer. An electric current is established between the anode and the upper surface of the wafer through the electroplating solution. The electric current is uniformly distributed by the porous electrically resistive material present between the anode and the upper surface of the wafer. The electric current causes the cations to be attracted to the upper surface of the wafer.
公开/授权文献
- US20090242413A1 Electroplating Head and Method for Operating the Same 公开/授权日:2009-10-01
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