Invention Grant
- Patent Title: Substrate processing including a masking layer
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Application No.: US12979627Application Date: 2010-12-28
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Publication No.: US08426970B2Publication Date: 2013-04-23
- Inventor: Zachary Fresco , Chi-I Lang , Sandra G. Malhotra , Tony P. Chiang , Thomas R. Boussie , Nitin Kumar , Jinhong Tong , Anh Duong
- Applicant: Zachary Fresco , Chi-I Lang , Sandra G. Malhotra , Tony P. Chiang , Thomas R. Boussie , Nitin Kumar , Jinhong Tong , Anh Duong
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/532

Abstract:
Methods for substrate processing are described. The methods include forming a material layer on a substrate. The methods include selecting constituents of a molecular masking layer (MML) to remove an effect of variations in the material layer as a result of substrate processing. The methods include normalizing the surface characteristics of the material layer by selectively depositing the MML on the material layer.
Public/Granted literature
- US20120001320A1 SUBSTRATE PROCESSING INCLUDING A MASKING LAYER Public/Granted day:2012-01-05
Information query
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