Invention Grant
- Patent Title: Piezoelectric actuator, optical reflection element using the same and piezoelectric driver
- Patent Title (中): 压电致动器，使用其的光反射元件和压电驱动器
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Application No.: US12673238Application Date: 2008-08-20
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Publication No.: US08437061B2Publication Date: 2013-05-07
- Inventor: Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa
- Applicant: Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: RatnerPrestia
- Priority: JP2007-219509 20070827; JP2008-020471 20080131
- International Application: PCT/JP2008/002246 WO 20080820
- International Announcement: WO2009/028152 WO 20090305
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L41/00
Abstract:
A first oscillating portion is provided with a first piezoelectric element having a first drive electrode. A second oscillating portion has a central axis different from that of the first oscillating portion and is provided with a second piezoelectric element having a second drive electrode. The first drive electrode and the second drive electrode are connected together.
Public/Granted literature
- US20110122471A1 PIEZOELECTRIC ACTUATOR, OPTICAL REFLECTION ELEMENT USING THE SAME AND PIEZOELECTRIC DRIVER Public/Granted day:2011-05-26
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