发明授权
- 专利标题： Mechanical resonating structures and methods
- 专利标题（中）： 机械共振结构和方法
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申请号： US12732575申请日： 2010-03-26
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公开(公告)号： US08446078B2公开(公告)日： 2013-05-21
- 发明人: Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
- 申请人： Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
- 申请人地址： US MA Cambridge
- 专利权人： Sand 9, Inc.
- 当前专利权人： Sand 9, Inc.
- 当前专利权人地址： US MA Cambridge
- 代理机构： Wolf, Greenfield & Sacks, P.C.
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
公开/授权文献
- US20100314969A1 MECHANICAL RESONATING STRUCTURES AND METHODS 公开/授权日：2010-12-16
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