Invention Grant
- Patent Title: Tool and method for eliminating multi-patterning conflicts
- Patent Title (中): 消除多图案化冲突的工具和方法
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Application No.: US13444158Application Date: 2012-04-11
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Publication No.: US08448100B1Publication Date: 2013-05-21
- Inventor: Hung Lung Lin , Chin-Chang Hsu , Ying-Yu Shen , Wen-Ju Yang , Hsiao-Shu Chao , Yi-Kan Cheng , Chin-Hsiung Hsu , Huang-Yu Chen , Yi-Chuin Tsai , Yuan-Te Hou , Chung-Hsing Wang
- Applicant: Hung Lung Lin , Chin-Chang Hsu , Ying-Yu Shen , Wen-Ju Yang , Hsiao-Shu Chao , Yi-Kan Cheng , Chin-Hsiung Hsu , Huang-Yu Chen , Yi-Chuin Tsai , Yuan-Te Hou , Chung-Hsing Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A computer implemented system comprises: a tangible, non-transitory computer readable storage medium encoded with data representing an initial layout of an integrated circuit pattern layer having a plurality of polygons. A special-purpose computer is configured to perform the steps of: analyzing in the initial layout of an integrated circuit pattern layer having a plurality of polygons, so as to identify a plurality of multi-patterning conflict cycles in the initial layout; constructing in the computer a respective multi-patterning conflict cycle graph representing each identified multi-patterning conflict cycle; classifying each identified multi-patterning conflict cycle graph in the computer according to a number of other multi-patterning conflict cycle graphs which enclose that multi-patterning conflict cycle graph; and causing a display device to graphically display the plurality of multi-patterning conflict cycle graphs according to their respective classifications.
Information query